High & Ultrahigh Vacuum Thin Film Deposition Technology

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e-Vap ®Evaporation Source AccessoriesInstallation HardwareListed below are the essential components required for a typical installation of stand-alonemodular e-Vap ® electron beam sources. Included are feedthroughs for source water coolingand all electrical interfaces. Manual and auto-indexer type rotary feedthroughs areavailable for the installation of multi-pocket sources. All components are fitted with industrystandard vacuum mounts to facilitate source installation onto existing coating systems.Standard mounts include... Del-Seal CF metal seal flanges and 1" baseplate O-ring sealmounts. Customers with Balzers systems with 1-1/4" base plate ports can use MDC 1-1/4"to 1" baseplate port adapters.Figure 1Figure 2Figure 3Figure 4DESCRIPTIONFIGUREREFERENCEPARTNUMBERPRICE$Thin Film DepositionFEEDTHROUGHS, WATER & ELECTRICALWATER, DUAL .312" TUBES, 2.75" DEL-SEAL 1WATER, DUAL .312" TUBES, 1" BASE-PLATE 1SWEEP COIL, 4 PIN .056, 1.33" DEL-SEAL 2SWEEP COIL, 4 PIN .056, 2.75" DEL-SEAL 2SWEEP COIL, 4 PIN .056, 1" BASE-PLATE 2TC-CRIMP CONTACTS FOR .056 PIN, Pkg of 5 2HIGH VOLTAGE, 2 PIN .250, 12kV 2.75" DEL-SEAL 3HIGH VOLTAGE, 1 PIN .312, 12kV 1" BASE-PLATE 10CONNECTOR, RIGHT ANGLE POWER, .25" PIN 3CONNECTOR, INLINE POWER, 25" PIN 3CONNECTOR, RIGHT ANGLE, .312" PINEV-LF275EV-LF1EV-IF133EV-IF275EV-IF1TC-CRIMPEV-HC275EV-HC1RAPCILPCREVHVC991534991726991531991532991727991538640005992940991537991536992818-0315028527527530060425395252575Figure 5Figure 7Figure 6Figure 8FEEDTHROUGHS, ROTARY BELLOWS SEALROTARY MANUAL, .250 SHAFT, 1.33" DEL-SEAL 4ROTARY MANUAL, .250 SHAFT, 2.75" DEL-SEAL 4ROTARY, .250 SHAFT BOTH ENDS, 1.33" DEL-SEAL 5ROTARY, .250 SHAFT BOTH ENDS, 2.75" DEL-SEAL 5HTBRM-133HTBRM-275EV-BRMI-133EV-BRMI-275670004670005991731991730450465525535FEEDTHROUGHS, ROTARY O-RING SEALROTARY, .250 SHAFT BOTH ENDS, 1" BASE-PLATE 6FRM-1652000345Figure 9Figure 10ASSEMBLY EQUIPMENTBASE-PLATE ADAPTER BALZERS 1-1/4" TO MDC 1" 7VCR ® GLAND, .250" MODIFIED .218" BORE 8VCR ® GLAND, .250" TO .312" TUBE ADAPTER 8WATER FLOW SWITCH, 110V 9WATER FLOW SWITCH, 240V 9HIGH VOLTAGE SAFETY GROUND HOOK 11HIGH VOLTAGE ACRYLIC SHIELD, 2-3/4" DEL-SEAL 12HIGH VOLTAGE ACRYLIC SHIELD, 1" BASE-PLATE 12EV-BAIEV-MVCREV-TAVCREV-WF110EV-WF24DEV-SGHHVE-2BHVE-2991813990610991809991031991031-01991106640051640057952210300300215195225Figure 11Figure 1242 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
e-Vap ®Ordering InformationShipping MethodAll standard shipments are made by thefollowing method unless otherwise specified:• FOB Hayward, California and Sarasota,Florida.• prepay and added to invoice (PPA);• shipped via UPS ground service or bestway as determined by MDC.Nonstandard shipments must be specified bythe customer. General notes include thefollowing:• orders may be specified to ship collect;• charges for nonstandard methods ofshipping are determined by the specifiedcarrier;• in some cases, oversized items may becharged at a “dimensional weight” (dimweight)rate which is substantially higherthan surface rates.MDC recommends in all cases that analternative carrier be named at the time oforder.Weights stated in this catalog are forreference only. Exact shipping weights aredetermined at the time of shipment.Payment TermsNet 30 days with prior credit approval.VISA ® , MasterCard ® and AmericanExpress ® credit cards, prepaid, are alsoaccepted.Prices and SpecificationsPrices and specifications are subject tochange without notice.DeliveryEvery effort will be made to ship within three(3) days of receipt of an order. In the event ofback-order, a firm delivery date will beestablished and quoted.WarrantyAll products manufactured by MDC VacuumProducts Corporation are warranted to befree from defects in materials andworkmanship for a period of twelve (12)months from the date of shipment by MDCVacuum Products Corporation to the buyer.Liability under this warranty is expresslylimited to repair or replacement of defectiveproducts at the option of MDC VacuumProducts Corporation. Products returned toMDC Vacuum Products Corporation for repairor replacement shall be received prepaid.Expendable items such as gaskets, bellows,bearings, lubricants, etc., may have a servicelife of less than one year in normal usage. Ifsuch items fail to give reasonable service fora period of time, as determined by MDCVacuum Products Corporation, they will berepaired or replaced by MDC VacuumProducts Corporation at its election.Return PolicyIn the event that a product is to be returnedto MDC, a Return Authorization (RA) numbermust be obtained from the MDC SalesDepartment prior to shipment of the product.Call the toll free number listed at the bottomof this page and request an RA number. Tofacilitate processing, please provide theoriginal date of purchase and either theoriginal purchase order number or theoriginal MDC sales order number.Products returned to MDC Vacuum ProductsCorporation for repair or replacement shallbe received prepaid. Items arriving without aReturn Authorization number will be refused.A product failing to give reasonable servicefor a period of time, as determined by MDCVacuum Products Corporation, will be repairedor replaced by MDC Vacuum ProductsCorporation at its election.Trademark OwnershipAmerican Express ® American Express Co.MasterCard ® Mastercard International Inc.VISA ® VISA International Service AssociationApiezon ®Avo Biddle InstrumentsAutoCad ®AutoDesk CorporationConflat ® , Fel-Pro ® Varian Associates Inc.Corning ® , Pyrex ®Corning Inc.Dicronite ® Rotary Components, Inc.Kovar ®Carpenter TechnologyMazak ®Yamazaki Mazak Corp.Slo-Syn ®Superior Electric Co.Suprasil Heraeus Amersil Inc.Swagelok ® , VCR ®Swagelok Co.Teflon ® E.I. DuPont de Nemours & Co., Inc.VacOptix ®Insulator SealViton ® , Buna ® , Kapton ® , Kalrez ® ,Krytox ® , Vespel ® , Delrin ® DuPont DowElastomersCab-Fast ®Caburn-MDC LimitedDel-Seal , Del-Base , Del-Weld , Kwik-Flange , Large-Flange , Mini-Scaffold ,Auto-Dock , C-Loc , Uni-Loc , V-Plane ,Re-Vap , e-Vap ®MDC Vacuum Products CorporationAll dimensions in this catalog are given ininches unless specified otherwise.Thin Film DepositionMDC customer service and technical department MDC inventory and stock room MDC shipping and receiving departmentMDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881743
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High & Ultrahigh Vacuum Thin Film Deposition Technology

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