High & Ultrahigh Vacuum Thin Film Deposition Technology

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e-Vap ®Thermal Evaporation SystemsPower SupplyWeighs only20 poundsFeatures■ 3000 Watt output■ Designed for industrial / production applications■ Compact size - mounts underneath chamber■ High frequency switching power supply■ 5 or 10 Volt tap option■ Connects to Sigma or Inficon rate controllers —making it stand-alone capable■ CE compliant■ 6000 Watt stack optionPower Supply SpecificationsThin Film DepositionRe-Vap Power SupplyDescriptionMDC’s high powered Re-Vap resistive evaporation system is a highlyindustrial, robustly designed, economical method of depositing thin filmcoatings. The current passing through a resistive element (filament, boat,etc.) is produced by a unique high current, low voltage switch-mode highfrequency power supply that produces ample amounts of current needed toevaporate materials such as iron, nickel, aluminum, copper, silver, gold andplatinum. Silicon-monoxide, magnesium fluoride, as well as zinc selenideare readily evaporated.Re-Vap Power Supply & ControllerMDC has taken advantage of its extensive knowledge of high frequencysolid-state switching power supplies by incorporating that technology into apatent applied high-powered 3000 watt Re-Vap power supply. Tremendoussize and weight reductions are the result. With overall dimensions of 5" x 8"x 13" and a total weight of 20-pounds, the power supply can be mountedunderneath the vacuum coating system just inches away from the high currentfeedthroughs. The power supply is only one-eighth the size and onetenththe weight of a typical 3000 watt resistive power supply. Two uniqueadvantages include higher power efficiency and floor space savings. Powerefficiency is greater because the output cable length is reduced with aresulting lower power loss. The Re-Vap controller is a half-rack width displaymodule displaying the current, voltage, safety interlock and status/operationindicators. For automated coating processes, it may be connected to arate/thickness controller for precise control. Power can also be controlledthrough the front panel or with the hand-held remote control.CoolingInput powerPower outputOption:CableWeightDimensionsAir cooled208/220/240 VAC, Single-phase, 50/60 Hz, 25 Amperes0 to 5 VDC @ 600 amps0 to 10 VDC @ 300 amps6-foot cable included30 lb shipping5" W x 8" H x 13" DRe-Vap clamp, High Current feedthrough and Z-bar extensionsThe Re-Vap positive clamping method is universally designed for heavy useand quick-change capability. Thumbscrews are provided for fast installationof boats or filaments. Air-side clamping uses silver-plated battery clampstylehard copper connections designed for maximum surface contact andhigh current carrying capacity.The Re-Vap high current 3/4-inch feedthroughs are rated at 600 amps. Ituses high purity alumina ceramic as the dielectric material, which is hermeticallysealed to a flexible metal transition using vacuum grade braze alloysin a vacuum brazing furnace. Additionally, a removable snap-on groundshield provides protection from line-of-sight coating on exposed ceramicsurfaces. Re-Vap feedthroughs are fitted with Del-Base baseplate mountsin standard one-inch, 32mm or 34mm sizes for use in most vacuum coatingsystems, including Balzers and Leybold systems.Z-bar extensions are used in cases where normally an evaporation sourcecannot be positioned because of spacing limitations. The modular Z-bar extensions allow you to maneuver your evaporation sources around fixedequipment inside your vacuum coating system. Its versatility allows you touse them singularly or in multiples for those hard to reach locations.6 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
e-Vap ®Thermal Evaporation SystemsResistive Heater EvaporationRe-Vap typical source installation, shown with two Z-bars and boat clampsFeatures■ Industrial design■ Feedthroughs rated at 600 amps■ Removable snap-on ground shield protectsagainst coating build-up■ Z-bars allow installation of sources in difficult orhard to reach locations■ Z-bars may be used singularly or in multiples■ Clamp designed for virtually any type ofcommercial heater elements up to 1.25" wide■ Ultra positive clamping methodTypical Heater ElementsTypical Installation SchematicMetal Foil BoatRe-Vap rigid clampRe-Vap rigid clampZ-bar Thin Film DepositionFilamentResistive sourceIn-vacuumshield1" Bolt hole mountfeedthroughSilver platedairside clampsBaffled Boat• Only one Z-bar shown ~ may be used inmultiplesRe-Vap clamp & Z-bar extensionStandard ElementsAll dimensions are given in inchesunless specified otherwise.MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-88177
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High & Ultrahigh Vacuum Thin Film Deposition Technology

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