High & Ultrahigh Vacuum Thin Film Deposition Technology

More documents

Recommendations

Info

e-Vap ®Subject Page Subject Page Subject PageThin Film DepositionAAccessories, e-Vap ®Consumable. . . . . . . . . . . . . . . . . . . 40-44General . . . . . . . . . . . . . . . . . . . . . . . . . 37Installation . . . . . . . . . . . . . . . . . . . . . . 42Acrylic, high voltage shieldFits 1" baseplate mounts . . . . . . . . . 37,42Fits 2-3/4" Del-Seal CF . . . . . . . . . 37,42Adapter, e-Vap ®1/4" to 5/16" tube . . . . . . . . . . . . . . . . 421-1/4" to 1" baseplate . . . . . . . . . . . . . 422mm wire feed . . . . . . . . . . . . . . . . . . . 11Alumina crucible liners . . . . . . . . . . . . . . . 39Anode, 3kW miniature source. . . . . . . . 13,16Anode, modular source. . . . . . . . . . . . . 40,41Applications, e-Vap ® . . . . . . . . . . . . . . . . . 2BBaseplateAdapter, 1-1/4" to 1" . . . . . . . . . . . . . . 42Beam former3kW source. . . . . . . . . . . . . . . . . . . . . . 13270º source. . . . . . . . . . . . . . . . . . . . . . 40Block insulator, filament 270º . . . . . . . . . 482Block, cathode 270º . . . . . . . . . . . . . . . . . 40Boron Nitride crucible liners . . . . . . . . . . . 40CCable, 25' source control. . . . . . . . . . . . . . 28Carbon crucible liners . . . . . . . . . . . . . . . . 39Carousel source, modular . . . . . . . . . . 21-22Cathode block 270º. . . . . . . . . . . . . . . . . . 40Coil feedthroughs . . . . . . . . . . . . . . . . . . . 42Electrical 4 pin .056", 2-3/4" . . . . . . . . 42Electrical 4 pin .056", 1-1/3" . . . . . . . . 42Electrical 4 pin .056", 1" baseplate. . . . 42Consumable accessories . . . . . . . . . . . 40-41Controller, deposition rate . . . . . . . . . . 33-34Copper crucible liners . . . . . . . . . . . . . . . . 39Crucible liners . . . . . . . . . . . . . . . . . . . . . . 39Crucible, resistive source oxide . . . . . . . . . . 5Crucible Indexer . . . . . . . . . . . . . . . . . . . . 36Crystal sensor packagesLow profile on 1" baseplate . . . . . . . . . 34Low profile on 2-3/4" . . . . . . . . . . . . . . 34High temperature on 2-3/4" . . . . . . . . . 34Low profile on 2-3/4" . . . . . . . . . . . . . . 34DXL-12 . . . . . . . . . . . . . . . . . . . . . . . . . . 35Deposition rate controller. . . . . . . . . . . 33-34Deposition ratesMonolayer . . . . . . . . . . . . . . . . . . . . . . . 10Stable . . . . . . . . . . . . . . . . . . . . . . . . . . 10EElectrical feedthrough, e-Vap ® Sweep,4 pin, .056" on 2-3/4" . . . . . . . . . . . . . 424 pin, .056" on 1-1/3" . . . . . . . . . . . . . 424 pin, .056" on 1" baseplate . . . . . . . . . 424 pin, .056" on 2-3/4 . . . . . . . . . . . . . . 42High voltage, 2 pin .250 on 2-3/4" . . . . 42High voltage, 2 pin .250 on 1" baseplate 42High current, Re-Vap . . . . . . . . . . . . . . 9Element, resistive source heater basketBaffled boat. . . . . . . . . . . . . . . . . . . . . . . 8Coil . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5Filament . . . . . . . . . . . . . . . . . . . . . . . . . 8Foil boat, metal . . . . . . . . . . . . . . . . . . . . 5Foil boat, coated metal . . . . . . . . . . . . . . 5Emitter assembly, 270º . . . . . . . . . . . . . . . 40Emitter assembly, HF. . . . . . . . . . . . . . . . . 41Extension kit, Re-Vap conductor . . . . . . . . 5FFasteners, non-galling . . . . . . . . . . . . . 40,41FeedthroughsElectrical . . . . . . . . . . . . . . . . . . . . . . . . 42Rotary . . . . . . . . . . . . . . . . . . . . . . . . . 42Water, dual 5/16 tube . . . . . . . . . . . . . . 42High current, Re-Vap Filament clamp . . . . . . . . . . . . . . . . . . . . . 42Filament sets,EV-100 . . . . . . . . . . . . . . . . . . . . . . . . . 113kw single . . . . . . . . . . . . . . . . . . . . . . 13Mighty Source TM . . . . . . . . . . . . . . . . . . . 16270º emitter . . . . . . . . . . . . . . . . . . . . . 40HF emitter . . . . . . . . . . . . . . . . . . . . . . . 41Filament transformer, source control . . . . . 28Filament, resistive sourceRe-Vap 900 . . . . . . . . . . . . . . . . . . . . . . 5Re-Vap 3000 . . . . . . . . . . . . . . . . . . . . . 8Flange mounted sourcesHorizontal . . . . . . . . . . . . . . . . . . . . . . . 24Miniature. . . . . . . . . . . . . . . . . . . . . . . . 13Mighty Source TM . . . . . . . . . . . . . . . . . . . 16Vertical . . . . . . . . . . . . . . . . . . . . . . . . . 25Flow switch, water . . . . . . . . . . . . . . . . . . 38Frame size, modular sourceFrame 1, 2, . . . . . . . . . . . . . . . . . . . . . . 19Frame 3,4 . . . . . . . . . . . . . . . . . . . . . . . 20Frame 5 . . . . . . . . . . . . . . . . . . . . . . . . 21Frame 6 . . . . . . . . . . . . . . . . . . . . . . . . 22GGland 1/4 VCR ® with .218" bore . . . . . . . 42Gland 1/4 VCR ® to 5/16"tube adapter . . . . . . . . . . . . . . . . . . . . . 42Graphite crucible liners . . . . . . . . . . . . . . . 39Grounding hook, high voltage . . . . . . . . . . 37Guide rods, horizontal flangedsource. . . . . . . . . . . . . . . . . . . . . . . . . . 38HHalf-rack spacer3-1/2" high . . . . . . . . . . . . . . . . . . . . . . 365-1/4" high . . . . . . . . . . . . . . . . . . . 28,32HF emitter . . . . . . . . . . . . . . . . . . . . . . . . . 41High voltage power supplies, 208 volt100W-EV-100 . . . . . . . . . . . . . . . . . . . . 113kW . . . . . . . . . . . . . . . . . . . . . . . . 13,156kW, 10kW, 15kW . . . . . . . . . . . . . . . . . 27High voltage power supplies, 400 volt6kW, 10kW, 15kW . . . . . . . . . . . . . . . . . 27High voltage shield, acrylicFits 2-3/4" Del-Seal CF . . . . . . . . . 37,42Fits 1" baseplate mount . . . . . . . . . . 37,42IIndexer, crucible . . . . . . . . . . . . . . . . . . . . 36Indirect watercooled sources . . . . . . . . 21,22InsulatorBeam deflector, 270º. . . . . . . . . . . . . . . 40Beam former, 270º . . . . . . . . . . . . . . . . 40Ceramic, 270º . . . . . . . . . . . . . . . . . . . . 40Filament block, 270º . . . . . . . . . . . . . . . 40High voltage, HF, 270º . . . . . . . . . . . 40,4144 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
e-Vap ®Subject Page Subject Page Subject PageJKLMManual shutter, push-pull . . . . . . . . . . . . . 38Miniature evaporation systems . . . . . . . 10-14Miniature sourcese-Vap ® 100W . . . . . . . . . . . . . . . . . 10-11e-Vap ® 3000W . . . . . . . . . . . . . . . . 12-13Mighty Source . . . . . . . . . . . . . . . . 14-15Modular sources, by frame sizeFrame 1, 2 . . . . . . . . . . . . . . . . . . . . . . 19Frame 3,4 . . . . . . . . . . . . . . . . . . . . . . . 20Frame 5 . . . . . . . . . . . . . . . . . . . . . . . . 21Frame 6 . . . . . . . . . . . . . . . . . . . . . . . . 22Modular sources, flangedHorizontal . . . . . . . . . . . . . . . . . . . . . . . 24Vertical . . . . . . . . . . . . . . . . . . . . . . . . . 25Molybdenum crucible liners. . . . . . . . . . . . 39Mouse, XY sweep . . . . . . . . . . . . . . . . . . . 32NOOrdering information . . . . . . . . . . . . . . . . . 43PPatterns, XY sweep . . . . . . . . . . . . . . . 30-31Pneumatic shutter2 position, 2 on 1-1/3" . . . . . . . . . . . . . 372 position, 2 on 2-3/4" . . . . . . . . . . . . . 372 position, 3 on 1-1/3" . . . . . . . . . . . . . 372 position, 3 on 2-3/4" . . . . . . . . . . . . . 37Power supplies, 208V input voltage100W, EV-100 . . . . . . . . . . . . . . . . . . . . 11900W, Re-Vap . . . . . . . . . . . . . . . . . . . . 43000W, Re-Vap . . . . . . . . . . . . . . . . . . . 63kW . . . . . . . . . . . . . . . . . . . . . . . . . 13,156kW, 10kW, 15kW . . . . . . . . . . . . . . . . . 27Power supplies 400V input voltage6kW, 10kW, 15kW . . . . . . . . . . . . . . . . . 27QRRate controller, deposition . . . . . . . . . . 33,34Re-Vap . . . . . . . . . . . . . . . . . . . . . . . . . . 4,9Remote mount filament transformer . . . . . 28Resistive source, Re-Vap . . . . . . . . . . . . 4,9Rods, guide, horizontal flanged source . . . 38Roof, watercooled . . . . . . . . . . . . . . . . 23-26SSafety accessoriesAcrylic shield, fits 1" baseplate . . . . . . . 37Acrylic shield, fits 2-3/4". . . . . . . . . . . . 37Grounding hook, high voltage . . . . . . . . 37Sensor packages, crystal. . . . . . . . . . . . . . 34XL-12 . . . . . . . . . . . . . . . . . . . . . . . . . . 35Shipping method . . . . . . . . . . . . . . . . . . . . 43Shutter, e-Vap ®Manual . . . . . . . . . . . . . . . . . . . . . . . . . 38Pneumatic. . . . . . . . . . . . . . . . . . . . . . . 37Single-pocket sources, modular . . . . . . . . 19Source control filament transformer . . . . . 28Source control module . . . . . . . . . . . . . . . 28Sources,Resistive, Re-Vap 900 . . . . . . . . . . . . . . 4Resistive, Re-Vap 3000 . . . . . . . . . . . 7-9Sweep coil feedthroughs . . . . . . . . . . . . . . 29Sweep patterns . . . . . . . . . . . . . . . . . . 31-31Sweep programmable controller, XY. . . 29-32Switch, water flow110 volt. . . . . . . . . . . . . . . . . . . . . . . . . 3824VDC volt . . . . . . . . . . . . . . . . . . . . . . 38Systems, e-Vap ®Horizontal, flanged electron beam . . . . . 23Miniature, flanged electronbeam . . . . . . . . . . . . . . . . . . . . . . . . . 13Miniature, flanged resistive . . . . . . . . . . . 4Vertical, flanged electron beam . . . . . . . 25Re-Vap 3000. . . . . . . . . . . . . . . . . . . . . 6TMighty source TM . . . . . . . . . . . . . . . . . . . 14Tantalum crucible liners . . . . . . . . . . . . . . 39Tungsten crucible liners. . . . . . . . . . . . . . . 39UVVCR ® Gland 1/4 with .218" bore . . . . . . . 42VCR ® Gland 1/4 to 5/16"tube adapter . . . . . . . . . . . . . . . . . . . . . 42Vitreous carbon crucible liners . . . . . . . . . 39WWarranty . . . . . . . . . . . . . . . . . . . . . . . . . . 43Water cooling, direct and indirect,e-Vap ® . . . . . . . . . . . . . . . . . . . . . . . . . 18Water feedthroughs, e-Vap ®Dual 5/16" tube on 1" baseplate. . . . . . 42Dual 5/16" tube on 2-3/4" . . . . . . . . . . 42Water flow switch . . . . . . . . . . . . . . . . . . . 38Watercooled roof, horizontal andvertical. . . . . . . . . . . . . . . . . . . . . . . 24,26Wire fed source-EV-11001mm wire . . . . . . . . . . . . . . . . . . . . . . . 112mm wire . . . . . . . . . . . . . . . . . . . . . . . 11XXY sweep controller, programmable . . . 29-32YZThin Film DepositionMDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881745
Page 1 and 2: High & Ultrahigh VacuumThin Film De
Page 3 and 4: Thin FilmDepositionIntroduction 2Th
Page 5 and 6: e-Vap ®IntroductionMaterial Sample
Page 7 and 8: Re-Vap Thermal Evaporation SystemsR
Page 9 and 10: e-Vap ®Thermal Evaporation Systems
Page 11 and 12: e-Vap ®Thermal Evaporation Systems
Page 13 and 14: e-Vap ®Miniature Evaporation Syste
Page 19 and 20: e-Vap ®Modular Evaporation Sources
Page 25: e-Vap ®Modular Evaporation Sources
Page 30 and 31: e-Vap ®Controls and MeasurementSou
Page 32 and 33: e-Vap ®Controls and MeasurementSwe
Page 34 and 35: e-Vap ®Controls and MeasurementCus
Page 36 and 37: e-Vap ®Controls and MeasurementDep
Page 38 and 39: e-Vap ®Controls and MeasurementCru
Page 40 and 41: e-Vap ®Evaporation Source Accessor
Page 48 and 49: e-Vap ®NotesThin Film Deposition46
Page 50 and 51: Visit www.mdcvacuum.comto order onl
Page 52: Thin Film TechnologyMDC Vacuum Prod

High & Ultrahigh Vacuum Thin Film Deposition Technology

You also want an ePaper? Increase the reach of your titles

Delete template?

Save as template?