High & Ultrahigh Vacuum Thin Film Deposition Technology

e-Vap ®Evaporation Source Accessories270º Emitter Consumable AccessoriesThe spare parts detailed below are a list of e-Vap ® consumable components which mayrequire periodic replacement. These components have been specifically designed for usewith MDC e-Vap ® electron beam evaporation sources and systems.Figure 1USED WITHDESCRIPTION FRAME SIZE FIGUREREFERENCEPARTNUMBERPRICE$Thin Film DepositionFigure 2Figure 4Figure 6Figure 3Figure 5Figure 7ANODE 1-6 1BEAM DEFLECTOR SHIELD 1, 2, 5, 6 2BEAM DEFLECTOR SHIELD 3, 4 2BEAM FORMER 1 - 6 3CATHODE BLOCK, LH 1, 2 4CATHODE BLOCK, RH 1, 2 4CATHODE BLOCK, LH 3 - 6 4CATHODE BLOCK, RH 3 - 6 4EMITTER ASSEMBLY 1, 2 6EMITTER ASSEMBLY, OLD 5 1 6EMITTER ASSEMBLY 6 6EMITTER ASSEMBLY 3 6EMITTER ASSEMBLY 4 6EMITTER ASSEMBLY, NEW 5 1 6FASTENERS, NON-GALLING 1 - 6 5FILAMENT CLAMP, LH 1 - 6 7FILAMENT CLAMP, RH 1 - 6 7FILAMENT SET, 5 ea. 1, 2, 6 8FILAMENT SET, 5 ea. 3, 4, 5 8INSULATOR, HIGH VOLTAGE 1 - 6 AINSULATOR, FILAMENT BLOCK 1 - 6 BINSULATOR, BEAM DEFLECTOR 1 - 6 CINSULATOR, BEAM FORMER 1 - 6 DEV-EAEV-BDSEV-BDSEV-BFEV-LCBEV-RCBEV-LCBEV-RCBEV-EA-1000EV-EA-4010EV-EA-4015EV-EA-4066EV-EA-4UHVEV-EA-4010EV-FKEV-LFCEV-RFCEV-FILEV-FILEV-IHVEV-IFBEV-IBDSEV-IBDS990537992201990534990533990525-01990526-01990525-02990526-02990630-01990630-02990630-03990630-04990630-06990630-059905859905319905329923309905279905309905289905359905293251156540200200200200145014501450145014501450504040606015201571 Older frame-five emitter assemblies are fitted with short design anodes as pictured in figure seven and bottom of figureone. New frame-five emitter assemblies are fitted with new extended design anodes as shown at top of figure one.Figure 8 Figure 9BACDDC40 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation