High & Ultrahigh Vacuum Thin Film Deposition Technology

e-Vap ®Modular Evaporation SourcesVertical Flange Mounted SourceMDC has eliminated the difficulties of flange mounting electronbeam sources. The effort that goes into designing and fitting asource to a vacuum coating chamber has been done for you with theintroduction of standard vertical flange mounted evaporationsources. The flanged assembly includes one 7cc electron beamsource with all water and electrical connections. This type of flangemounted system is typically installed vertically through the bottomside of a chamber. The compact footprint of these flanged evaporationsystems requires only one port flange for installation. A popularoption commonly ordered with these systems is a water-cooled roof,which mounts directly above the e-Vap ® source. The water-cooledroof acts as a heat barrier between the source and substrate andalso prevents vapor condensation on chamber walls.The watercooled roof is fitted with a deposition port, angled towardsthe substrate, which yields excellent deposition uniformity, evenwhen source to substrate centerlines are offset. The single-pocketsource comes standard with a 7cc capacity crucible. The sameassembly can be fitted with larger capacity sources including 15, 25and 40cc versions. To order the larger volume crucible option addone of the three option numbers to the end of the assembly partnumber. Vertical systems purchased with a source control modulewill be fitted with flange-mounted filament transformers.MOUNTING FRAME SOURCE COOLING SOURCE WEIGHTFLANGE SIZE TYPE & VOLUME ROOF NUMBER POUNDSREFERENCEPARTNUMBERPRICE$10" DEL-SEAL 1 ONE POCKET 7cc NO 990598 5010" DEL-SEAL 1 ONE POCKET 7cc YES 990598 50EV-FMP-10VEV-FMP-10RV9925119925131475015500Optional AccessoriesThin Film DepositionOPTION -01Pneumatic ShutterShutters mask off the vapor stream betweensource and substrate. Shutters are ideal forpre-melt or “soak” prior to deposition by blanketingthe evaporation material. Pneumaticshutters for vertical flanged assemblies cannotbe mounted on source flange, but can beinstalled through a secondary 1.33" Del-Seal CF port. This shutter is a two position shutterwhich includes a 120VAC solenoid.OPTION -06 TO -08Custom Crucible VolumeThe standard volume for a single-pocket crucibleis 7cc. For single pocket volumes of 15,25 or 40cc add option -06, -07 or -08 respectively.OPTION -04Custom Source PositionSource position is the distance from the sourceface to mounting flange seal face. This dimensionis standard at 6" for all vertical systems.Customer chamber layout or specificationsmay dictate a custom distance. Source positionsbetween 6" and 10" are optional andavailable at the price listed bellow. Dimensionsoutside these limits must be quoted separately.OPTION -05Custom Roof PortsWatercooled roofs have three ports. A mainport directly over the source, which is usedfor the deposition process. A second port forthe crystal sensor is used to monitor depositionrate. A third port provides direct visualinspection of the source and beam through achamber viewport. Each of these port locationscan be specified by the customer.DESCRIPTIONPNEUMATIC SHUTTER, TWO POSITIONCUSTOM SOURCE POSITIONCUSTOM COOLING ROOF PORTS15cc CRUCIBLE25cc CRUCIBLE40cc CRUCIBLEOPTIONNUMBER-01-04-05-06-07-08PRICE$15005001250CallCallCallWhen ordering e-Vap ® assembly options, please add the option number(s) to the end of thedesired assembly Part Number listed above. For example 992511-01-04-05-0826 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation