High & Ultrahigh Vacuum Thin Film Deposition Technology

e-Vap ®Miniature Evaporation SystemsSourceAperture3.75TantalumShield,1.29" O.D.x 0.02" wallComplete SystemWire FeedAdapter2.75Del-Seal CFFlangeSource Assemblyis manually fed by a precision linear drive feedthrough, and must befed periodically as determined by source evaporation rates. The e-Vap ® 100 source evaporates high temperature refractory metalsincluding Tantalum, Molybdenum and Tungsten and most other materialsmanufactured in wire form. High temperature materials are notreadily evaporated using Knudsen or Effusion cells, making thee–Vap ® 100, because of its miniature size, an excellent PhysicalVapor Deposition (PVD) evaporation source. The elements table at leftdepicts calculated deposition rates for various pure materials.Thee-Vap ® 100 source is constructed with refractory metals for rapidequilibrium with minimal outgassing, to withstand elevated temperatureswithout the need for water cooling and to reduce the possibilityof contamination in sensitive UHV applications. The source has anoutgas mode to allow vacuum conditioning of the evaporation head.This degas feature allows heating of the e-Vap ® 100 head to driveoff any adsorbed contaminant. The source is mounted on a 2-3/4"Del-Seal CF flange. Power connections are made via four SHV coaxialconnectors clearly labeled for filament positive, filament negative,anode and screen inputs. Maintenance on the evaporation head ismade simple with easy replacement of all key components.The e-Vap ® 100 power supply incorporates all switching technologyfor the high-voltage and filament sections. This translates to a smallerand lighter package, greatly improved arc-suppression and betteremission current control. Arcs are suppressed in the order ofmicroseconds rather than the millisecond response in other 50/60Hzsystems. This, combined with lower levels of stored energy, preventthe molten tip of the evaporant rod from being “blown away” duringan arc, a common occurrence with older systems.7.451.63DESCRIPTIONCOMPLETE SYSTEM 1SOURCE ASSEMBLY100W POWER SUPPLYPOWER SUPPLY SPARE PARTS KIT2MM WIRE-FEED ADAPTERFILAMENT SET, 5 ea.1 Includes source and power supplyREFERENCEEV-100EV-SA-100EV-PS-100EV-PS-SPK-100EV-2MM-100EV-FIL-100SHVCoaxialFeedthroughsLinear MotionFeedthroughHigh TemperaturePARTNUMBER991029992458991192991257-07992589992596PRICE$13500377595003015560Thin Film DepositionMDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881711