High & Ultrahigh Vacuum Thin Film Deposition Technology
High & Ultrahigh Vacuum Thin Film Deposition Technology
High & Ultrahigh Vacuum Thin Film Deposition Technology
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e-Vap ®Modular Evaporation SourcesHorizontal Source AssemblyHorizontal Flange Mounted SystemFeatures■ UHV compatible system■ 8" or 10" Del-Seal CF flange mount■ Assembly includes rotary, linear and electricalfeedthroughs, clamps, linkages, water flow switchand water connections■ Manual, push-pull shutter■ <strong>High</strong> temperature, 300°C manual rotary drive on4 pocket models; blanked off on single pocket■ Flange seal surface to crucible centerline is 8" on8" Del-Seal CF■ Flange seal surface to crucible centerline is 10"on 10" Del-Seal CF■ Systems available with or without watercooledroofsUHV Single-Pocket Source10.00 with 10" Flange8.00 with 8" FlangeCoolingRoofCrucible Face to Flange Center Line0.30" Fixed on 8" Flange0.14" Fixed on 10" Flange1.38" Rotary on 10" Flange<strong>Thin</strong> <strong>Film</strong> <strong>Deposition</strong>10.75 Shutter Open8.75 Shutter ClosedSource/CrucibleWater LinesShown withUHV Rotary-Pocket SourceFrame Size 4Cooling RoofWater LinesShown with10" Del-Seal CFFlange14.0 with 10" Flange12.0 with 8" FlangeUHV Rotary-Pocket SourceManual ShutterLinear FeedthroughPocket IndexerRotary FeedthroughFilament Transformer<strong>High</strong> Voltage FeedthroughX-Y SweepInstrumentation FeedthroughGuide RodSupport BushingsMDC <strong>Vacuum</strong> Products Corporation www.mdcvacuum.com Phone 800-443-881723
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