High & Ultrahigh Vacuum Thin Film Deposition Technology

More documents

Recommendations

Info

e-Vap ®Modular Evaporation SourcesFrame 3SmallRotary PocketSpecificationsSource SizeSmallSource TypeRotary PocketMaximum Power6kWOperating Voltage 6kV to 10kVFilament12VACCrucible Geometry / VolumeMulti-Pocket4x 6cc, 6x 3ccCarousel360°, 15ccX-Y Sweep Frequency 200HzEvaporation Rate of Aluminum8,000Å/min @6kW with a source tosubstrate distance of 250mmBeam Spot Size7mmCrucible Material OFHC CopperBakeout Temperature150 ° CMaterialsHV CompatibleCompatible Vacuum 2x10 -8 TorrWater Flow2GPM and / or 65PSIG inlet-outlet differentialDimensions 5.32L x 5.12W x 2.46HWeight10 lbsREFERENCECRUCIBLEVOLUMEMAXIMUMPOWERPARTNUMBERPRICE$EV-4000-66EV-6000-664 X 6cc 6kW6 X 3cc 6kW9916009921661050010750Frame 4SmallUHV Rotary PocketThin Film DepositionSpecificationsSource SizeSmallSource Type UHV Rotary PocketMaximum Power6kWOperating Voltage 6kV to 10kVFilament12VACCrucible Geometry / VolumeMulti-Pocket4x 6ccX-Y Sweep Frequency 200HzEvaporation Rate of Aluminum8,000Å/min @6kW with a source tosubstrate distance of 250mmBeam Spot Size7mmCrucible Material OFHC CopperBakeout Temperature200 ° CMaterialsUHV CompatibleCompatible Vacuum 2x10 -11 TorrWater Flow1.75GPM or 65PSIG inlet-outlet differentialDimensions 8.37L x 5.37W x 3.37HWeight17 lbsREFERENCECRUCIBLEVOLUMEMAXIMUMPOWERPARTNUMBEREV-4000-66UHV 4 X 6cc 6kW 991700PRICE$1375020 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
e-Vap ®Modular Evaporation Sources8.2Frame 5LargeHV & UHV Rotary PocketSpecificationsSource SizeLargeSource Type HV Rotary PocketUHV Rotary PocketMaximum Power10kWOperating Voltage 6kV to 10kVFilament12VACCrucible Geometry / VolumeMulti-Pocket 4x... 15, 25 & 30cc, 6x 12ccCarousel360° 150ccCombination Custom designs availableEvaporation Rate of Aluminum30,000Å/min @10kW with a source tosubstrate distance of 250mmX-Y Sweep Frequency 200HzBeam Spot Size7mmCrucible Material OFE CopperBakeout Temperature150 ° CMaterialsHV CompatibleCompatible Vacuum 2x10 -8 TorrWater Flow3GPM and / or 65PSIG inlet-outlet differentialDimensions 6.20L x 5.62W x 3.25HWeight27 lbsREFERENCECRUCIBLE MAXIMUM COOLINGVOLUME POWERPARTNUMBERPRICE$EV-4000-1050EV-6000-1015UHVEV-4000-1025EV-4000-1030EV-6000-1012EV-4000-615iEV-4000-625iEV-4000-630iEV-4000-150CARiEV-4000-150CAR4 X 15cc4 X 15cc4 X 25cc4 X 30cc6 X 12cc4 X 15cc4 X 25cc4 X 30cc1 X 150cc1 X 150cc10kW10kW10kW10kW10kW6kW6kW6kW6kW10kWDirectDirectDirectDirectDirectIndirectIndirectIndirectIndirectDirect99190099270099180099240899210099252599250099258599250299252310500166251122511675116751143511500125501187511250Thin Film DepositionMDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881721
Page 1 and 2: High & Ultrahigh VacuumThin Film De
Page 3 and 4: Thin FilmDepositionIntroduction 2Th
Page 5 and 6: e-Vap ®IntroductionMaterial Sample
Page 7 and 8: Re-Vap Thermal Evaporation SystemsR
Page 9 and 10: e-Vap ®Thermal Evaporation Systems
Page 11 and 12: e-Vap ®Thermal Evaporation Systems
Page 13 and 14: e-Vap ®Miniature Evaporation Syste
Page 19 and 20: e-Vap ®Modular Evaporation Sources
Page 21: e-Vap ®Modular Evaporation Sources
Page 25: e-Vap ®Modular Evaporation Sources
Page 28 and 29: e-Vap ®Modular Evaporation Sources
Page 30 and 31: e-Vap ®Controls and MeasurementSou
Page 32 and 33: e-Vap ®Controls and MeasurementSwe
Page 34 and 35: e-Vap ®Controls and MeasurementCus
Page 36 and 37: e-Vap ®Controls and MeasurementDep
Page 38 and 39: e-Vap ®Controls and MeasurementCru
Page 40 and 41: e-Vap ®Evaporation Source Accessor
Page 46 and 47: e-Vap ®Subject Page Subject Page S
Page 48 and 49: e-Vap ®NotesThin Film Deposition46
Page 50 and 51: Visit www.mdcvacuum.comto order onl
Page 52: Thin Film TechnologyMDC Vacuum Prod

High & Ultrahigh Vacuum Thin Film Deposition Technology

Create successful ePaper yourself

Delete template?

Save as template?