High & Ultrahigh Vacuum Thin Film Deposition Technology

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e-Vap ®Modular Evaporation SourcesThin Film DepositionCustom Sources and AssembliesCustom source and source assemblies can be designed to fit anexisting chamber or for a special application. Contact MDC fordetails regarding custom source assemblies or custom sources.Featurese-Vap ® Modular Evaporation SourcesCustom source and source assemblies■ Six Frame SizesCrucible / Pocket GeometryStandard configurations■ Single, Multipocket or Carousel Crucibles■ Custom Crucible configurations available■ Crucible sizes from 6cc to 400cc■ Power ratings from 6kW to 15kW■ Direct or indirect water coolingOptions■ Source Options are available-Consult with MDC for existingdesigns, availability and list prices.■ Single Pocket Sources (Frame 1 and Frame 2) UHV compatiblesources, volumes 7cc to 100 cc.■ UHV Rotary Mechanism (Frame 4 and Frame 5) allows forUHV operation of the multi pocket sources.■ Direct and Indirect Cooling (Frame 5 and Frame 6) optionfor both of these frame sizes. direct cooling allows for higherpower levels to be applied during deposition, the water sealmust be disturbed to change the crucible. Indirect coolingallows the crucible to be removed without disturbing the waterto vacuum seal, however maximum power levels are lower withindirect cooling.■ Custom Crucibles Can be machined with various pocketsizes and configurations depending upon your application. MDCwill manufacture any custom crucible that is required includiingsingle, four pocket, six pocket, pan carousel and bananas.Custom configurationsSingle-PocketCenteredMulti-Pocket 44@90°Multi-Pocket 66@60°Carousel360° Pan1x270°, 1@45°Shown above is one of many possibilities.Contact factory for special geometries.FRAME NUMBER VOLUME MAXIMUMSIZE OF POCKETS PER POCKET POWERREFERENCEPARTNUMBERPRICE$Standard Multi Pocket Sources that havebeen identified by our customers as themost popular sources are listed to the right.MDC is has made a commitment with subcomponentinventory to offer reduced leadtimes for standard multipocket sources.3 4 6cc 6kW4 4 6cc 6kW5 4 15cc 10kW5 4 25cc 10kW5 6 12cc 10kW5 1 150cc 10kW6 4 40cc 15kW6 4 75cc 15kW6 1 400cc 15kW6 6 40cc 15kWEV-4000-66EV-4000-66UHVEV-4000-1015EV-4000-1025EV-6000-1012EV-4000-150CAEV-4000-1540EV-4000-1575EV-4000-400CAEV-6000-15409916009917009919009918009921009925239924059924069931019931001050013750112251122511675112501422514625145251472518 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
e-Vap ®Modular Evaporation Sources8.2Frame 1SmallFixed PocketSpecificationsSource SizeSmallSource TypeFixed PocketMaximum Power15kWOperating Voltage 6kV to 10kVFilament12VACCrucible Geometry / VolumeSingle-Pocket 7, 15, 25 & 40ccX-Y Sweep Frequency 200HzEvaporation Rate of Aluminum50,000Å/min @14kW with a source tosubstrate distance of 250mmBeam Spot Size7mmCrucible Material OFE CopperBakeout Temperature200 ° CMaterialsUHV CompatibleCompatible Vacuum 2x10 -11 TorrWater Flow3GPM and / or 65PSIG inlet-outlet differentialDimensions 6.60L x 4.90W x 2.10HWeight9 lbsREFERENCECRUCIBLEVOLUMEMAXIMUMPOWERPARTNUMBERPRICE$EV-1000-67EV-1000-1015EV-1000-1025EV-1000-15407cc15cc25cc40cc6kW10kW10kW15kW9905989905999905979906007850785078507850Frame 2SpecificationsSource SizeLargeSource TypeFixed PocketMaximum Power15kWOperating Voltage 6kV to 10kVFilament12VACCrucible Geometry / VolumeSingle-Pocket75 & 100ccX-Y Sweep Frequency 200HzEvaporation Rate of Aluminum50,000Å/min @15kW with a source tosubstrate distance of 250mmBeam Spot Size7mmCrucible Material OFHC CopperBakeout Temperature200 ° CMaterialsUHV CompatibleCompatible Vacuum 2x10 -11 TorrWater Flow3GPM and / or 65PSIG inlet-outlet differentialDimensions 6.60L x 5.50W x 2.25HWeight10 lbsLargeFixed PocketThin Film DepositionREFERENCECRUCIBLEVOLUMEMAXIMUMPOWERPARTNUMBERPRICE$EV-1000-1575EV-1000-1510075cc100cc15kW15kW992250992430875011750MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881719
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High & Ultrahigh Vacuum Thin Film Deposition Technology

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