High & Ultrahigh Vacuum Thin Film Deposition Technology

e-Vap ®Controls and MeasurementSweep Pattern TypesAll of these patterns may have their sweep characteristics andparameters highly modified. These parameters include SPEED, PHASE,and POWER PROFILE.SPEED is defined as the speed of which the beam travels to completeone cycle of a given pattern. The fundamental frequency of beam sweepis speed. SPEED settings are Fast, Medium, and Slow. Fast is consideredthe base time, Medium takes twice as long, and Slow takes fivetimes as long.PHASE is defined as angular pattern rotation per cycle. The pattern isrotated a few degrees after each sweep pattern cycle. PHASE settings areFast (50 degree steps), Medium (20 degree steps), Slow (10 degreesteps), and None.POWER PROFILE is defined as speed of the beam based on its distancefrom the center of the crucible. It allows the beam to sweep faster throughthe center of the crucible than at the outer edges. The parameter of apattern crossing a crucible too many times, thus resulting in “tunneling”of the material, may be adjusted to obtain “even” beam temperaturedistribution across the crucible surface. POWER PROFILE settings rangefrom 1 to 1/R 2 . A setting of 1 is considered as the beam dwell time, beingthe same for all points. A setting of 1/R 2 is considered the beam dwelltimes being four times greater on the outer edges of the crucible. Adjustingthe profile between 1 and 1/R 2 (twenty possible adjustments) is a newfeature for the sweep controller and adds coating process optimization tothis already valuable parameter.Select PatternCircle PatternThin Film DepositionThe Select pattern allows the user to view patterns 1 through 99. Allpatterns may be started and/or edited from here as well.A CIRCLE pattern makes the beam sweep in concentric circles beginning atthe outer edge of the crucible and steps closer to the center of the cruciblewith each revolution. Upon reaching the center, a reverse cycle begins andthe beam sweep pattern continues.Spiral PatternFigure 8 PatternA SPIRAL pattern makes the beam sweep in a continuous spiral, beginning The FIGURE 8 pattern makes the beam sweep in a well-defined figure 8at the outer edge of the crucible and advancing toward the center and then path across the crucible.back out again.30 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation