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High & Ultrahigh Vacuum Thin Film Deposition Technology

High & Ultrahigh Vacuum Thin Film Deposition Technology

High & Ultrahigh Vacuum Thin Film Deposition Technology

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e-Vap ®Controls and MeasurementCrucible IndexerFeatures■ Direct drive-No pulleys or belts to set or adjust■ Electronic calibration of position■ 8 predefined pocket configurations included■ User configurable feature allows for custom or specialpocket configurations■ Can be operated manually or by external controller■ Two speed ranges for a total of 20 speed settings■ 1.8º resolution■ CE compliante-Vap® Crucible Indexer<strong>Thin</strong> <strong>Film</strong> <strong>Deposition</strong>SpecificationsMOTOR DRIVEMotor typemicro-stepperTorque1.4 N-m (200 oz-in)Speed (RPM) low: 0.05, 0.06, 0.08, 0.10, 0.12, 0.15, 0.19, 0.24, 0.30, 0.37high: 0.5, 0.6, 0.8, 1.0, 1.2, 1.5, 1.9, 2.4, 3.0, 3.7Resolution1.8ºlRepeatability0.25ºlSize (height x width x depth) 89 x 89 x 122 mm (3.5" x 3.5" x 4.8")Weight1.5 Kg (3.2 lbs)Power12 W (supplied by controller)The e-Vap® Crucible Indexer is a micro stepper controlled motor driveunit used to position and rotate a multi-hearth electron beam source.The crucible indexer will rotate and position up to eight pocket positions,additional eight preprogrammed configurations can be selected via dipswitch settings at the back of the controller. These include: 4 pocket, 6pocket, 2 pocket, 180° Banana, 3 pocket 90° Banana, 3 pocket 120°Banana, 3 pocket 135° Banana, 3 pocket 145° Banana, or Continuous360° rotation. An additional dip switch lets the user select the followingmodes: Bi-Direction (shortest path between pockets), CounterClockwise Rotation, UHV Source Type, <strong>High</strong> Speed Range, BCD I/O, andEnable Ethernet communications. In addition the indexer can be userconfigured for any pocket / banana crucible layout. The Indexer alsoeliminates mechanical adjustment of the home or 1st pocket location,the "home" position can be defined electronically.SpecificationsCONTROLLERPockets up to 8digital inputsbinary or BCD encodedlow = 0 to 2 Vdc, high = 4 to 24 Vdc, non-isolatedCommunicationsRS-232 or EthernetSize (height x width x depth) 88 x 213 x 197 mm (3.5" x 8.4" x 7.75")Weight2.7 Kg (6 lbs)Power100-120 / 200-240 VAC, 50/60 Hz, 20WComplianceCE (LVF & ECD)Interconnecting cable10ft (3m), standard DB25The e-Vap® Crucible Indexer can be controlled either manually orremotely, it can be configured to interface with most deposition controllerequipped to select pockets on a multi layer deposition. AWindows-based configuration screen can be used to customize thepocket layout. The drive motor comes with a bracket to attach to a 2.75inch Del Seal rotary feedthrough or to a 1 inch bolt type rotaryfeedthrough. The indexer is supplied with a coupling to connect the 1/4inch drive shaft to the 1/4 inch feedthrough shaft. The e-Vap® CrucibleIndexer is designed to be one of the most flexible methods to customizeor fine tune crucible rotation and control for multi hearth electron beamsources.DESCRIPTIONCRUCIBLE INDEXERREFERENCEPARTNUMBEREV-CI-INDEXER 991400PRICE$225536 Phone 800-443-8817 www.mdcvacuum.com MDC <strong>Vacuum</strong> Products Corporation

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