High & Ultrahigh Vacuum Thin Film Deposition Technology

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Re-Vap Thermal Evaporation SystemsThin Film DepositionResistive Heater EvaporationFeatures■ 900W power supply■ 2-3/4" Del-Seal CF flange mount■ Ideal for organic material evaporation■ Contact factory for higher current modelsSpecificationsCoolingInput powerVoltage outputCurrent outputWeightDimensionsPower SupplyOutput CableAir cooled208 V ±10%, Single-phase, 50/60 Hz, 7 Amperes0 to 6 VAC0 to 150 A45lb16" W x 6" H x 12" L2 AWG x 10' LMDC’s Re-Vap resistive filament heater evaporation is an economicaland reliable method of depositing thin film coatings in vacuum.Current passing through a resistive element generates sufficientheat to melt and evaporate various coating materials. Materials commonlyevaporated using resistive heating include iron, nickel, aluminum,copper, tin, silver, gold and platinum. Re-Vap resistiveevaporation can be used for decorative metallizing as well asdemanding research applications. Three basic resistive elementdesigns are offered: filament coil, metal foil boat and oxide crucibletypes. Filament coil designs are by far the most popular. Re-Vap heater elements are economical and disposable. They can be discardedafter each use to prevent material contamination.coil. To minimize dripping of the molten material, the filament coiltemperature must be increased rapidly to 1200-1500°C. Using thistechnique, the molten material will climb or cling to the hot wire andvaporize efficiently. Another type of element coil is the filament basket,used to evaporate pellets or chips of materials which either sublimeor do not wet the filament wire upon melting. If wetting occurs,the coils of the basket are shorted and the temperature of the sourcedrops.Metal foil boat type resistive elements are yet another choice forsmall evaporation applications. Metal foil boats are made from thinrefractory metal stampings, usually tungsten, molybdenum or tantalum.These boats have dimples which hold the evaporation material.Their miniature size and small capacity make them ideal for smallevaporation jobs. Metal foil boats operate at very high temperaturesand may cause alloying to occur with certain types of evaporationmaterials. Wetting of the metal surface by the molten evaporant isdesirable in the interest of good thermal contact, however, themolten metal will lower the electrical resistance of the foil in the meltarea, thereby causing a drop in temperature. This problem can beeliminated by using a boat which has been coated with a thin layerof aluminum oxide. The oxide coating will not allow wetting of themolten metal evaporant to the metal foil element.Crucible heaters are an open circular wound filament which allowcrucibles to be inserted inside the windings. The crucibles are commonlymanufactured from alumina, carbon, quartz and boron nitride.Crucibles have insulating properties which form a thermal barrierbetween the filament and melt, allowing a uniform melt temperature.Crucible evaporation is very stable because of its uniform heating. Awide range of low to moderate temperature metals like palladium,tin, selenium, arsenic, indium and organic materials evaporate wellfrom crucibles. Crucibles are less prone to failure compared to metalfoil boats because of the complete isolation between the evaporantand the heater element, thus eliminating shorting or alloying.Re-Vap 900 Watt Power SupplyRe-Vap coiled filaments are typically three stranded tungsten wireslooped into coils. Multistrand filaments are generally used becausethey offer a greater surface area than single wire filaments. Underthese conditions, the evaporant charge should be small comparedwith the mass of the filament. The filament can hold up to 1 gram ofevaporant material which is formed into staple-like shapes and hungon the central helix of the tungsten filament. Upon melting, the evaporantwets to the filament and is held in place by surface tension.Spreading of the molten evaporant across the wire is desirable toincrease evaporation surface area. This is accomplished by distributingthe initial charge evenly over the entire length of the filament004221-2.7x3.64 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
Re-Vap Thermal Evaporation SystemsRe-Vap Source AssemblyDESCRIPTIONCOMPLETE SYSTEM 1900W POWER SUPPLYRESISTIVE SOURCE ASSEMBLY 2CONDUCTOR EXTENSION KITPOWER SUPPLY SPARE PARTS KITMETAL FOIL BOAT, TUNGSTENMETAL FOIL BOAT, TANTALUMMETAL FOIL BOAT, MOLYBDENUMCOATED FOIL BOAT, TUNGSTENCOATED FOIL BOAT, MOLYBDENUMFILAMENT COILFILAMENT BASKETOXIDE CRUCIBLE, ALUMINAOXIDE CRUCIBLE, BORON NITRIDEOXIDE CRUCIBLE, QUARTZREFERENCERH-900RH-PS-900RH-F-900RH-CEK-900RH-PSPK-900RH-MFB-900TURH-MFB-900TARH-MFB-900MRH-CFB-900TURH-CFB-900MRH-FC-900RH-FB-900RH-OC-900ARH-OC-900BNRH-OC-900QPARTNUMBER992626991256992625992619991257-08992624-01992624-02992624-03992623-01992623-02992622992621992620-01992620-02992620-03PRICE$34502450110024520172813252514172025201 Includes power supply and resistive source assembly.2 Includes filament coil heater element.Conductor Extension KitHeater ElementsResistive Heater Source AssemblyCoated Metal Foil Boat5.002.75Del-Seal CF Flange.77Thin Film DepositionFilament CoilStandard Elements7.253.75Oxide CrucibleAcrylicHigh-VoltageShield2.75MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-88175
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