High & Ultrahigh Vacuum Thin Film Deposition Technology

More documents

Recommendations

Info

Frame 6 Electron Beam SourceMighty Source mounted on a 6-inch CF flangeXY Programmable Sweep Controllere-Vap ® SummaryVacuum coating technology has evolvedfrom an art form to a precise science overthe past 40 years. It is now commonplaceto evaporate metals, alloys, compoundsand polymers, and control their desiredthicknesses from mere atomic layers toactual microns.Thin Film DepositionMDC produces state-of-the-art thin filmvacuum coating equipment. We currentlysupply users in the optical, metallurgical,medical, semiconductor, research &development, university and OEMmarketplace.Numerous applications include sunglasses,mirrors, laser optics, camera lenses, opticalfilters, infrared detectors, anti-reflectivecoatings, nano-technologies, medicaldevices, superconductors, telecommunications,automotive decorative trim,costume jewelry, corrosion resistantcoatings, stage & entertainment lighting,fiber optic coating, display technologiesand MEMs technology.The e-Vap ® Product LineMDC offers a wide range of choices andoptions. We understand that every vacuumsystem configuration may be different. Weoffer many standard off-the-shelfcomponents as well as customized designsto suit your particular deposition equipmentneed. The e-Vap ® product line supportstwo distinct evaporation methods: the firstbeing thermal or resistive evaporation andthe second being electron beamevaporation.Resistive EvaporationThe Re-Vap resistive sources are by farthe most economical and reliable methodof depositing thin films onto surfaces. Ingeneral terms, electric current passesthrough a resistive element that generatessufficient heat to melt and evaporatevarious coating materials. Materialscommonly evaporated include iron, nickel,aluminum, copper, tin, silver, gold andchrome. Three basic resistive elementdesigns are offered: filament coil, metal foiland oxide crucible types. Filament coildesigns are the most popular. All resistiveelements are relatively inexpensive andcan be discarded after each use or afterseveral uses.Electron Beam EvaporationMDC offers an unprecedented selection ofelectron beam evaporation sources andcontrol electronics. Electron beamevaporation is the most versatile means ofvacuum evaporation and deposition. Thistechnique allows the production of thin filmcoatings from pure elements, numerousalloys and compounds. Electron beamevaporation offers several advantages overcompeting processes including precisecontrol of low or high deposition rates,excellent material utilization, sequential &co-deposition and uniform low temperaturedeposition. It also offers relatively highevaporation rates, freedom from sourcecontamination, precise film compositionsand cooler substrate temperatures. Thematerials used for evaporation areavailable in near limitless shapes andforms, the most common being pellets,slugs and disks. Since the 1950s, thedevelopment of higher performance filmsand complex coating processes has beenobstructed by the lack of modern electronbeam evaporation equipment andtechnology. The e-Vap ® product line hastaken this challenge head-on and provideselectron beam evaporation sources andcontrol electronics that incorporate leadingedge technologies unmatched in theindustry.CVS High Voltage Power SupplyCopyright © 2005 MDC Vacuum Products CorporationReproduction in any manner, in whole or in part, in English orin other languages, is prohibited. All rights reserved.
Thin FilmDepositionIntroduction 2Thermal EvaporationRe-Vap 900 4Re-Vap 3000 6Miniature Evaporation Systemse-Vap ® 100 10e-Vap ® 3000 12Mighty Source 14Modular Evaporation SourcesIndividual Source 17Horizontal Source Assembly 23Vertical Source Assembly 25Power Supplies 27Controls & MeasurementSource Control Module 28XY Programmable Sweep Controller 29Deposition Monitoring and Control 33Crucible Indexer 36Evaporation Source Accessories 37HF Emitter Assembly 41Ordering Information 43Index 441
Page 1: High & Ultrahigh VacuumThin Film De
Page 5 and 6: e-Vap ®IntroductionMaterial Sample
Page 7 and 8: Re-Vap Thermal Evaporation SystemsR
Page 9 and 10: e-Vap ®Thermal Evaporation Systems
Page 11 and 12: e-Vap ®Thermal Evaporation Systems
Page 13 and 14: e-Vap ®Miniature Evaporation Syste
Page 19 and 20: e-Vap ®Modular Evaporation Sources
Page 25: e-Vap ®Modular Evaporation Sources
Page 30 and 31: e-Vap ®Controls and MeasurementSou
Page 32 and 33: e-Vap ®Controls and MeasurementSwe
Page 34 and 35: e-Vap ®Controls and MeasurementCus
Page 36 and 37: e-Vap ®Controls and MeasurementDep
Page 38 and 39: e-Vap ®Controls and MeasurementCru
Page 40 and 41: e-Vap ®Evaporation Source Accessor
Page 46 and 47: e-Vap ®Subject Page Subject Page S
Page 48 and 49: e-Vap ®NotesThin Film Deposition46
Page 50 and 51: Visit www.mdcvacuum.comto order onl
Page 52:
Thin Film TechnologyMDC Vacuum Prod
show all

High & Ultrahigh Vacuum Thin Film Deposition Technology

You also want an ePaper? Increase the reach of your titles

Delete template?

Save as template?