Thin Film Application in Magnetic Recording - NCCAVS - User Groups
Thin Film Application in Magnetic Recording - NCCAVS - User Groups
Thin Film Application in Magnetic Recording - NCCAVS - User Groups
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<strong>Th<strong>in</strong></strong> <strong>Film</strong> Read <strong>Magnetic</strong> SensorMgO TMR Ratio Highly Sensitive toBarrier Process and Chamber Condition /Target QualitySputter Condition Anneal<strong>in</strong>g Condition Surface RoughnessStack:Sub/Ta5/UL50/Ta5/NiFe5/IrMn8/CoFe2/Ru8/CoFeB3/MgO/CoFeB30/Ta5/Ru15 (nm)Tohoku Univ. and Hitachi Ltd.© 2012 HGST, a Western Digital company HGST ConfidentialZ. Gao11