Thin Film Application in Magnetic Recording - NCCAVS - User Groups
Thin Film Application in Magnetic Recording - NCCAVS - User Groups
Thin Film Application in Magnetic Recording - NCCAVS - User Groups
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<strong>Th<strong>in</strong></strong> <strong>Film</strong> Plasma TreatmentFree FM LayersSpacer LayersRef. FM LayersLow Power Plasma TreatmentSmoothes <strong>Film</strong> w few Å RemovalHf Reduction and MR ratio Improvement:Ref Layer (~20Å) Roughness Reduction;High Quality Growth of Spacer layer;Improve Density and Resistivity of Ref FM Layer.US Patent 026470A1 2004 IBM© 2012 HGST, a Western Digital company HGST ConfidentialZ. Gao8