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Thin Film Application in Magnetic Recording - NCCAVS - User Groups

Thin Film Application in Magnetic Recording - NCCAVS - User Groups

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PVD Tools for <strong>Magnetic</strong> SensorAnelva 7100Ulvac ENTRON-EXMultiple DC/RF CathodeUltra High Vacuum (-9 to -10 Torr)Angstrom level of control with uniformityS<strong>in</strong>gulus TIMARISWafer Size 150mm to 300mm© 2012 HGST, a Western Digital company HGST ConfidentialZ. Gao13

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