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Linearization, Advanced Digital Control, State Controller

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tt.DDL: Dynamic <strong>Digital</strong> <strong>Linearization</strong>Nanometer Trajectory during Dynamc ScansImproved Piezo <strong>Control</strong>:Dynamic <strong>Digital</strong> <strong>Linearization</strong>(DDL)Conventional piezo controllerscannot completely avoid phaseshiftand tracking errors in applicationswith rapid, periodicmotion. This is due in part tothe non-linear nature of thepiezoelectric material, the finitecontrol bandwidth and the inherentlimitations of P-I (proportional-integral)servocontrol,which only reacts whena position error is detected. TheDDL option (ordering numberE-710.SCN), available withrecent digital piezo controllerssuch as E-753 (single-channel,see p. 2-108) or E-712 (multichannel,see p. 2-140), solvesthis problem. This technology,developed by PI, reduces theerror between the current anddesired position to impercep -tible values. The dynamiclinearity and effectively usablebandwidth are thus improvedby up to three orders of magnitude.DDL is of benefit to singleandmulti-axis applicationswhere motion follows a giventrajectory repeatedly (seemeasurement curves).Ordering InformationE-710.SCNFirmware Upgrade DDL(Dynamic <strong>Digital</strong> <strong>Linearization</strong>)Available for controllers:E-712, E-725 and E-753.notice.Nanopositioning systems with conventional PID controller:Single axis movement with a 312 Hz triangular signal. Thedifference between target and actual position can be up to 2.6 µm.Elliptical scan with a XY piezo scanner and conventionalP-I-servo controller. The outer curve shows the desiredposition, the inner curve shows the actual motion.Connt erol(PI)0ectKGalmeitrugstDik In9G/06.mb2H2EysiSubj& Coo2BRO1© Phch ange without009Nanopositioning system with DDL option: The same single axismovement as above, with 312 Hz triangular signal. The differencebetween target and actual position is practically unobservable andis about 7 nanometers.The same scan as before but with a DDL controller.The tracking error is reduced to a few nanometers,desired and actual position cannot be distinguished inthe graph.W W W . P I . W S


tt.APC: <strong>Advanced</strong> Piezo <strong>Control</strong>Alternative <strong>Control</strong> Concept for Faster SettlingTransient response of ansystem with optimated PIDparameters (blue) and<strong>Advanced</strong> Piezo <strong>Control</strong> (pink).An alternative control concept The phase trueness is signifi-Ordering Informationis available for the modular cantly improved compared toE-712 controller for nanoposi- the damping with one or even E-712.U1Firmware Upgrade <strong>Advanced</strong>tioning systems: <strong>Advanced</strong> two notch filters. This hasPiezo <strong>Control</strong>Piezo <strong>Control</strong>. It is based on a immediate effects on the trajecstatecontroller which, in turn, is tory trueness and the settling <strong>Advanced</strong> Piezo <strong>Control</strong> is alsoavailable for the E-753based on a model of the posi- response.(1 Channel) and for the E-725tioning system.(3 Channels). Ask your PI SalesLimitations of theDepartment.<strong>Advanced</strong> Piezo <strong>Control</strong> <strong>Advanced</strong> Piezo <strong>Control</strong>actively damps the resonance If the mechanical system hasfrequency, in contrast to con- too many resonances closeventional PID controllers with together, or if the resonancenotch filter where the mechani- frequency to be damped iscal resonance is cut out of the about 1 kHz or more, the stateexcitation spectrum.controller in this form no longerhas any advantage over con-APC: <strong>Advanced</strong> Piezo <strong>Control</strong>ventional PID controllers.Faster and More StablePlease discuss your applicationThe consequences are faster with us.settling times and lower sensitivitywith respect to interferencesfrom the outside.Connt erol(PI)0ectKGoch200ange without9almeitrugstDik In2Eysi9G/06.mb2HSu&BRO1© PhbjConotice.Bode plot of an unloaded, Bode plot of a closed loop system with Bode plot of an system controlledopen loop system with two one notch filter at the first resonance. with <strong>Advanced</strong> Piezo <strong>Control</strong>. Theresonance frequencies.resonances are better suppressed, thephase deviation is lower compared tothe suppression with a notch filter.W W W . P I . W S

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