CapaciTorr Pumps MK5 Series_Layout 1 - SAES Getters

CartridgeCapaciTorr cartridges are based on getter material St 172, which is configured in the form ofsintered porous disks. These sintered porous disks are arranged in the cartridge structure ina way to optimize speed and capacity performance. The C400-2 DSK cartridge also includes,in its structure, the pump heating element.Pump BodyThe optional pump body is a simple double flanged nipple. If desired, the pump can bemounted nude inside the vacuum system to fully exploit its pumping speed. The pumpbody is leak tested to 1.5 x 10 -10 scm 3 /s.HeaterThe heater of CapaciTorr D2000, D1000, D200, D100 and D50 pumps consists of atantalum wire inside an alumina insulator. This heater assembly also includes the cartridgeand securing components, and additionally the thermocouple in the CapaciTorr D1000 andD2000 models. The heater of the CapaciTorr D400-2 pump consists of a tungsten wireinserted in a ceramic tabulation. This heater is part of the pump cartridge structure.ThermocoupleThe thermocouple is a K-type electrically insulated within an alumina tube. Thethermocouple is available for the CapaciTorr D2000 and D1000 models.FlangeThe support flange is a standard CF type. The pumps flange is leaked tested to 1.5 x10 -10 scm 3 /s.Electrical ConnectorThe special connector allows the connection of the pump to the power supply and controlunit. The connector is bakeable up to 400 °C.

CapaciTorr ®D 400-2HIGHLIGHTSGeneral Features£ High pumping speed for all activegases£ High sorption capacity and increasedlifetime£ Costant pumping speed in HV, UHVand XHV£ Reversible pumping of hydrogen andits isotopesThe CapaciTorr ® D 400-2 pump uses the high performing St 172 (Zr-V-Fe) material in theform of disks to achieve high pumping performances in a very compact configuration. It isideal when maximum pumping speed is needed in a small package. The getter cartridgehas a built-in heater that directly connects to the flange power feedthrough. A bakeableconnector provides an easy and fast connection to the pump power supply for activationpurposes. The CapaciTorr D 400-2 pump offers its best performances when mounteddirectly in the vacuum system using the standard CF 35 flange. Alternatively the pump canbe mounted as an appendage using a custom-made pump body. The pumping speedcurves related to different mounting positions and the activation curves are shown in thefollowing page.£ Possibility of operation at roomtemperature after activation, withoutpower£ Operation in the presence of highmagnetic fields£ Oil free and vibration free in ultrahigh vacuum£ Low weightApplications£ Improving ultimate vacuum incombination with ion, diffusion,cryogenetic or turbomolecular pumps£ Surface analysis systems£ Particle accelerators, synchrotronradiation sources and relatedequipment£ Process pumps for vacuum devicesand deposition chambers£ Portable vacuum instrumentation£ Pumping, storing and releasinghydrogen isotopes£ Impurities removal in rare gas filleddeviceswe support your innovationOrdering InformationDimensions in mmProduct Product description CodeBase flange with Connector CapaciTorr CF 35 4H0402Base flange with Connector and Body CapaciTorr CF 35 J 4H0423St 172 Cartridge with built-in Heater C 400-2 DSK 4H0419Pump Body Body CapaciTorr CF 35 4H0401Power supply and cablesProduct Product description CodeNEG Power Supply CapaciTorr CF 35 D 400/B 200 Power Supply 3B0389Input Cable Cable Mains Input CF 35 3Mt 3B0338Output Cable Cable Supply Output CF35 D 400/B 200 3Mt 3B0390

1000CapaciTorr ® D400-2sorption test (according to ASTM F798-97)CapaciTorr ®D 400-2Pumping Speed (l/s)201810010Sorption Temperature: 25°CActivation:60' @ 15.75 V (85 W)Sorption pressure: 3E-6 TorrHeating parametersN 2with body10,001 0,01 0,1 1 10Sorbed Quantity (Torr · l )nudeCOH 26The SAES Getters Groupmanufacturing companies areISO9001 certified, the Asianand Italian companies areISO14001certified also. Fullinformation about ourcertifications for eachcompany of the Group isavailable on our website at:www.saesgetters.com165Voltage (V)1412108643Current (A)D.VS.111.2422050 150 250 350 450 550Temperature (°C)Voltage (V) Current (A)1Note: The voltage and current vs temperature data, displayed in the graph, have been achievedin nude configuration (NEG Cartridge completely immersed in the chamber).Typical Pump Characteristics CapaciTorr D 400-2Alloy Type St 172Alloy CompositionZrVFeGetter Mass (g) 45Getter Surface (cm 2 ) 380Pumping Speed (l/s)H 2 400CO 180H 2 450Sorption Capacity(Torr ll) CO at 25 °C 0.9CO total 400Note: Pumping speed data refer to the initial values of the pump without the pump body.CO capacity based on speed below 20 l/s in nude configuration.© 2012 SAES Getters. Printed in Italy. All rights reserved. SAES ® is a registeredtrademark of SAES Getters S.p.A., its subsidiaries and affiliates.SAES Getters reserves the right to change or modify product specifications at any time without notice.SAES Getters Groupwww.saesgetters.comneg_technology@saes-group.com

CapaciTorr ®D 1000HIGHLIGHTSGeneral Features£ High pumping speed for all activegases£ High sorption capacity and increasedlifetime£ Costant pumping speed in HV, UHVand XHV£ Reversible pumping of hydrogen andits isotopesThe CapaciTorr ® D 1000 pump uses highly porous St 172 sintered getter disks (Zr-V-Fealloy). The pump is able to reach 1000 l/s pumping speed for hydrogen in UHV conditions.The St 172 getter cartridge is mounted on a heater structure using a single heater element,and it is available on CF63 and CF100 flanges. The flanges (AISI 316 LN) are convenientlysupplied with a custom made bakeable electrical connector which combines power andthermocouple pins, for best integration and minimum footprint. St 172 material offerssuperior gas diffusivity characteristics and allows operation at room or intermediatetemperatures (200 °C) to increase the sorption capacity in presence of high gas loads. Thepump sorption speed is at its maximum when the pump is mounted directly in the vacuumsystem without a body. The pumping speed curves related to different mounting positionsand the activation curves are shown in the enclosed graphs.£ Possibility of operation at roomtemperature after activation, withoutpower£ Operation in the presence of highmagnetic fields£ Oil free and vibration free in ultrahigh vacuum£ Low weightApplications£ Improving ultimate vacuum incombination with ion, diffusion,cryogenetic or turbomolecular pumps£ Surface analysis systems£ Particle accelerators, synchrotronradiation sources and relatedequipment£ Process pumps for vacuum devicesand deposition chambers£ Portable vacuum instrumentation£ Pumping, storing and releasinghydrogen isotopes£ Impurities removal in rare gas filleddeviceswe support your innovationOrdering InformationDimensions in mmProduct Product description CodeSt 172 Cartridge with built-in Heater CapaciTorr D 1000 4H0468CF63 base flange with Connector CapaciTorr base flange CF63 4H0467CF100 base flange with Connector CapaciTorr base flange CF100 4H0469Pump Body CF63 Body CF63 4H0241Pump Body CF100 Body CF100 4H0224

10000CapaciTorr ® D1000sorption test (according to ASTM F798-97)CapaciTorr ®D 1000Pumping Speed (l/s)Voltage (V)1000100101Sorption Temperature: 25°CActivation:60' @ 50 V (210 W)Sorption pressure: 3E-6 TorrN 2 COSorbed Quantity (Torr · l )Heating parameters6054,5504403,53302,52201,51010,500 100 200 300 400 500 6000700Temperature (°C)0,10,01 0,1 1 10 100H 2Current (A)The SAES Getters Groupmanufacturing companies areISO9001 certified, the Asianand Italian companies are alsoISO14001 certified. Fullinformation about ourcertifications for eachcompany of the Group isavailable on our website at:www.saesgetters.comD.VS.112.1Voltage (V)Current (A)Note:The voltage and current vs temperature data, displayed in the graph, have beenachieved in nude configuration (NEG Cartridge completely immersed in the chamber).Typical Pump Characteristics CapaciTorr D 1000Alloy Type St 172Alloy CompositionZrVFeGetter Mass (g) 136Getter Surface (cm 2 ) 1140Pumping Speed (l/s)H 2 1000CO 600H 2 1360Sorption Capacity(Torr ll) CO at 25 °C 4CO total 1224Note: Pumping speed data refer to the initial values of the pump without the pump body.CO capacity based on speed below 30 l/s in nude configuration.Power supply and cablesProduct Product description CodeNEG Power Supply NEG pump controller V1.1 3B0351NEG Power Supply RS 485 NEG pump controller V1.1 800P 3B0366Input Cable Cable Mains Input V1.1 2Mt 3B0336Output Cable Cable supply output with K-TC/3Mt-V1.1-HT 3B0420© 2012 SAES Getters. Printed in Italy. All rights reserved. SAES ® is a registeredtrademark of SAES Getters S.p.A., its subsidiaries and affiliates.SAES Getters reserves the right to change or modify product specifications at any time without notice.SAES Getters Groupwww.saesgetters.comneg_technology@saes-group.com

CapaciTorr ®D 2000HIGHLIGHTSGeneral Features£ High pumping speed for all activegases£ High sorption capacity and increasedlifetime£ Costant pumping speed in HV, UHVand XHV£ Reversible pumping of hydrogen andits isotopes£ Possibility of operation at roomtemperature after activation, withoutpowerThe CapaciTorr ® D 2000 MK5 pump is the highest performing pump of the CapaciTorrseries. With the use of a special highly porous sintered Zr-V-Fe getter material, St 172, thepump is able to reach 2000 l/s pumping speed for hydrogen in UHV conditions. The St 172getter cartridge is mounted on a heater structure using a single heater element, and it isavailable on CF100 and CF150 flanges. The flanges (AISI 316 LN) are conveniently suppliedwith a custom made bakeable electrical connector which combines power andthermocouple pins, for best integration and minimum footprint. St 172 material offerssuperior gas diffusivity characteristics and allows operation at room or intermediatetemperatures (200 °C) to increase the sorption capacity in presence of high gas loads. Thepump sorption speed is at its maximum when the pump is mounted directly in the vacuumsystem without a body. The pumping speed curves related to different mounting positionsand the activation curves are shown in the enclosed graphs.£ Operation in the presence of highmagnetic fields£ Oil free and vibration free in ultrahigh vacuum£ Low weightApplications£ Improving ultimate vacuum incombination with ion, diffusion,cryogenetic or turbomolecular pumps£ Surface analysis systems£ Particle accelerators, synchrotronradiation sources and relatedequipment£ Process pumps for vacuum devicesand deposition chambers£ Portable vacuum instrumentation£ Pumping, storing and releasinghydrogen isotopes£ Impurities removal in rare gas filleddeviceswe support your innovationDimensions in mmOrdering InformationProduct Product description CodeBase flange with Connector and Heater CapaciTorr CF100 MK5 4H0439Base flange with Connector and Heater CapaciTorr CF150 MK5 4H0438Base flange with Connector, Heater and Body CapaciTorr CF100 MK5 J 4H0441Base flange with Connector, Heater and Body CapaciTorr CF150 MK5 J 4H0442St 172 Getter Cartridge C 2000 DSK 4H0418

10000CapaciTorr ® D2000sorption test (according to ASTM F798-97)CapaciTorr ®D 2000Pumping Speed (l/s)1000Voltage (V)100N 2Sorption Temperature: 25°C10Activation:45' @ 110 V (495 W)Sorption pressure: 3E-6 TorrCO10,001 0,01 0,1 1 10Sorbed Quantity (Torr · l )nudeCF100 bodyHeating parameters120610058046034022010050 150 250 350 450Temperature (°C)Voltage (V)Current (A)H 2Current (A)The SAES Getters Groupmanufacturing companies areISO9001 certified, the Asianand Italian companies are alsoISO14001 certified. Fullinformation about ourcertifications for eachcompany of the Group isavailable on our website at:www.saesgetters.comD.VS.113.1Note:The voltage and current vs temperature data, displayed in the graph, have beenachieved in nude configuration (NEG Cartridge completely immersed in the chamber).Typical Pump Characteristics CapaciTorr D 2000Alloy Type St 172Alloy CompositionZrVFeGetter Mass (g) 225Getter Surface (cm 2 ) 1900Pumping Speed (l/s)H 2 2000CO 1000H 2 2250Sorption Capacity(Torr ll) CO at 25 °C 5CO total 2000Note: Pumping speed data refer to the initial values of the pump without the pump body.CO capacity based on speed below 50 l/s in nude configuration.Power supply and cablesProduct Product description CodeNEG Power Supply NEG pump controller V1.1 3B0351NEG Power Supply RS 485 NEG pump controller V1.1 800P 3B0366Input Cable Cable Mains Input V1.1 2Mt 3B0336Output Cable 3Mt lenght Cable supply outpu t V1.1-5 3Mt 3B0337Output Cable 5Mt lenght Cable supply output V1.1-5 5Mt 3B0361© 2012 SAES Getters. Printed in Italy. All rights reserved. SAES ® is a registeredtrademark of SAES Getters S.p.A., its subsidiaries and affiliates.SAES Getters reserves the right to change or modify product specifications at any time without notice.SAES Getters Groupwww.saesgetters.comneg_technology@saes-group.com