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PORTER Gas Mass Flow Control - regula servis

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The Standard of Excellence in <strong>Mass</strong> <strong>Flow</strong>Porter <strong>Mass</strong> <strong>Flow</strong> products reflect over four decades of experiencein the design and manufacture of precision instruments for themeasurement and control of gas flow. They incorporatedesign principles that are simple and straightforward,yet flexible enough to operate under a wide varietyof process parameters. The result is flowmeters,flow controllers and control valves that areaccurate, reliable and cost-effectivesolutions for many gas mass flowapplications in the analytical,process, chemical/petrochemical,environmental,1biopharmaceutical andresearch markets.342Features1234Removable Three Wire Sensor – Reliable drift free performance, easy replacement andattitude insensitivity.Unique Laminar <strong>Flow</strong> Element Package – Individually scaled for inherent linearity at all flowranges.Choice of <strong>Control</strong> Circuitry – Analog or digital controls with multiple I/O and power optionsallow configuration versatility. Card edge connection is available for retrofit applications.Simplified Valve Design – Reliability and flexibility with a normally open option.– 1 –


Products500/600 Series <strong>Mass</strong> <strong>Flow</strong> Meters and <strong>Control</strong>lersThe same quality and reliability as our 100/200 Series described below,with the added benefit of microprocessor electronics. They featurepercent of reading accuracy, multi-gas capability and fast response withAnalog, Modbus, DeviceNet and Profibus communication options.Full scale flow rates from 5 SCCM up to 1000 SLPM. (See detailedspecifications on page 5 and available capacities on page 3.)100/200 Series <strong>Mass</strong> <strong>Flow</strong> Meters and <strong>Control</strong>lersThe latest evolution of the original Porter Analog MFC. With thousandsinstalled worldwide, they are the proven solution when cost effectivehigh performance gas flow control is the goal. The 100 Series <strong>Mass</strong> <strong>Flow</strong>Meters are available for applications where flow measurment only isrequired.Full scale flow rates from 5 SCCM up to 1000 SLPM with 0-5, 0-10 Vdcand 4-20 mAdc I/O options. (See detailed specifications on page 5 andavailable capacities on page 3.)3600 Series <strong>Mass</strong> <strong>Flow</strong> Meters & <strong>Control</strong>lersDigital MFC performance in a robust package designed for severeduty applications. NEMA 4x, IP66, Class 1, Div 2, IECex and AtexZone 2 Certifications* are available along with a variety of I/O, powerrequirement and process connection options.Full scale flow rates from 100 SCCM up to 100 SLPM. (See detailedspecifications on page 5 and available capacities on page 3.)* IEC and ATEX Certifications pending.3200 Series <strong>Mass</strong> <strong>Flow</strong> Meters and <strong>Control</strong>lersCompact size and Class 1, Div 2 certification makes the 3200 Series theideal choice for low flow applications in hazardous locations. Availableas either a direct mount SP-76 device or with in-line compressionfittings. 4-20 mAdc I/O and 24 Vdc power.Full scale flow rates from 10 SCCM up to 10 SLPM. (See detailedspecifications on page 5 and available capacities on page 3.)2200 Series <strong>Mass</strong> <strong>Flow</strong> Meters and <strong>Control</strong>lersLow cost without compromise in performance. The aluminum and brassconstructed 2200 Series features the same sensor, control electronics,flow elements and valve internals as the 200 Series at 30% lower cost.Full scale flow rates from 40 SCCM up to 10 SLPM. (See detailedspecifications on page 5 and available capacities on page 3.)MPC Series <strong>Mass</strong> <strong>Flow</strong> <strong>Control</strong>lersA unique concept in cost-efficient mass flow control. These unitscombine a fast and accurate mass flow controller with the necessaryelectronics for a complete closed-loop control system and userinterface. All in a compact, panel mount, 1/16 DIN package.Full scale flow rates of 0.5, 2.0, 5.0, and 20 SLPM. (See detailedspecifications on page 5 and available capacities on page 3.)– 2 –


CapacitiesType Model Max.<strong>Flow</strong> 1Analog<strong>Flow</strong>MetersAnalog<strong>Flow</strong><strong>Control</strong>lers(SLPM)Max.Pressure 2(PSIG)Min.Delta 3(PSIG)111 10 1500 2121 10 3000 2112 100 1500 2122 100 3000 2113 500 1000 2114 1000 1000 22111 10 200 23211 10 1000 2201 10 1000 7221 10 3000 7251 50 1000 35202 100 1000 60222 100 3000 60202A 100 200 10203A 500 200 40204A 1000 200 802201 10 200 73201/3261 10 1000 7Type Model Max.<strong>Flow</strong> 1Digital<strong>Flow</strong>MetersDigital<strong>Flow</strong><strong>Control</strong>lers(SLPM)Max.Pressure 2(PSIG)Min.Delta 3(PSIG)511 10 1500 2521 10 3000 2512 100 1500 2522 100 3000 2513 500 1000 2514 1000 1000 23611 10 1500 23612 100 1500 2601 10 1000 7621 10 3000 7651 50 1000 35602 100 1000 60602A 100 200 10603A 500 200 40604A 1000 200 803601 10 1500 73602 100 1500 30MPC 20 75 221The maximum full scale flow rate available.2The maximum operating inlet pressure available.3The minimum required pressure differential for maximum full scale flow rate.NOTE: All flow and pressure specifications are based on N 2gas. Consult factory for specifications on other gasses.AccessoriesConnector KitsPart NumberA-2420-000A-2420-001A-2420-002DescriptionCard Edge Connector Kit. Used toconnect customer-fabricated cableassembly to an MFM/MFC, completewith card edge connector.Nine (9)-Pin D-Connector Kit. Usedto connect customer-fabricated cableassembly to an MFM/MFC, completewith D-connector.Fifteen (15)-Pin D-Connector Kit.Used to connect customer-fabricatedcable assembly to Model CM-4000.General Purpose Power Supplies (+15 Vdc)Part NumberDescriptionFor use with up to four (4) <strong>Mass</strong>PS-2-115VAC <strong>Flow</strong>meters or two (2) <strong>Mass</strong> <strong>Flow</strong><strong>Control</strong>lersFor use with up to four (4) <strong>Mass</strong> <strong>Flow</strong>PS-4-115<strong>Control</strong>lers<strong>Control</strong> ModulePart NumberCM-400Cable AssembliesPartNumberDescription4 Channel Power Supply/Setpoint<strong>Control</strong> Module. 110/240 VAC (Seepage 6)Length(in ft.)KC18040-010 10KC18040-025 25KC18040-050 50C-700-002 10C-700-003 25C-700-004 50C-1666-010 10C-1666-025 25MFM/MFCConnectorTypeCard EdgeD-TypeD-TypeConnectsToCustomerSuppliedElectronics**CustomerSuppliedElectronics**CM-400**Electronics end is finished by tinning each conductor containedin the cable. Electrical connector for electronics is suppliedseparately, either by Porter Instrument or by customer. Refer toConnector Kits pricing for available electrical connectors.– 3 –


SpecificationsSeries>> 100/200 2200 3200 500/600 3600 MPC<strong>Flow</strong> Capacity See Capacity Chart, page 3Response Time(per SEMI E17-91Settling Time)Accuracyand LinearityRepeatabilityRangeability(<strong>Control</strong> Range)Ambient andOperatingTemperature RangeMaximumOperating PressureTemperatureCoefficient(per SEMI E18-91)Pressure Coefficient(per SEMI E28-92Total CalibrationEffect)MountingOrientation2 to 3Seconds±1% fullscale*3 to 4Seconds±2% fullscale2 to 3Seconds±1% fullscale1 to 2Seconds±1.0% of reading(20%-100% full scale)±0.8% of reading plus±0.2% full scale (below20% full scale)Within ±0.2% full scale at any constant temperaturewithin operating temperature range50:1 (2%-100% full scale) (accuracy and control)10°C to 70°C (14°F to 158°F)See Capacity Chart, Page 31Second±2% fullscale±1% fullscale4-100% full scale(MPC 95, MPC024)2-100% full scale(MPC05, MPC20)-10°C to 50°C(14°F to 122°F)±0.05% full scale/ºC of zero, ±0.05% of reading/ºC of span ±0.1% FS/°C±0.1%/Atmosphere Typical using N 2Attitude insensitive.2%-2% F.S./Atm.(Model & flowdependant)Horizontal,Top upWarm-up Time 10 Minutes N/AExternal ElectricalConnector9 pin “D”(Edge card optionalon 100/200 Series)10-foot,22 AWG,8-conductorpower-limitedtray cable,stripped andtinned ends9 pin “D”Turckminifastandeurofast,(modeldependant)ScrewTerminalsSetpoint Input/<strong>Flow</strong>Signal Output0-5 Vdc, 0-10 Vdc,4-20 mAdc,1-5 Vdc/4-20 mAdc4-20 mAdcSame as 100/200 Seriesplus Modbus, Profibus,DeviceNet.Touch Pad dataentry, LED display,0-5 Vdc & 1-5 Vdcexternal inputsPower SupplyRequirements* ±1.5% for Models 114 and 204A+12-15 Vdc(0-5 Vdc I/O), +15-24 Vdc(4-20 mAdc I/O)+15-24 Vdc


Materials of ConstructionSeries>> 100/200 2200 3200 500/600 3600 MPCBody 316 SS Aluminum 316 Stainless Steel BrassSensor Assembly 316L Stainless Steel MEMSOrifice 316 SS Brass 316 Stainless Steel BrassValve Components(Wetted)Elastomers(O-rings and ValveSeat)Process ConnectionsSame as3200316 SS302 Stainless Steel, 316 Stainless Steel,430F Stainless Steel and Sandvik ® 1802Same as 3200,less KalrezBrass &AluminumBuna N, EPDM, Kalrez ® ,Neoprene or Viton ®BrassViton316 Stainless Steel BrassModel CM-400 MFC Power Supply/<strong>Control</strong> ModulePorter Model CM-400 is a highperformance microprocessorbased 4-channel power supply/control module designed for usewith Porter <strong>Mass</strong> <strong>Flow</strong> Meters and<strong>Control</strong>lers. An 8-line, backlit LCDdisplay provides selectable dataon the status of the 4 channelssimultaneously; low noise,thermal overload protected +15Vdc device power is provided oneach channel. The CM-400 acceptsuser selectable current or voltageinput signals and supplies aselectable setpoint signal for eachchannel. In addition to the analogI/O, a digital communicationport is included for computer/PLC interface. A programmablemulti-channel blend controland totalizer with batch functionallows the CM-400 to preciselyinteract with Porter MFCs ina versatile and functional gasmanagement system.For further information, seeBulletin FM-1180.Product Features and Options:• 4 Independent Channels• Displays in SelectableEngineering Units• Multiple I/OConfigurations• Programmable <strong>Gas</strong>Correction Factors• Programmable Multi-Channel Blend <strong>Control</strong>• Totalizer and Batch<strong>Control</strong>• +15 Vdc MFC PowerOutput• 110/240 Vac Operation– 5 –


Ordering InformationAnalog <strong>Mass</strong> <strong>Flow</strong> Meters/<strong>Control</strong>lersUse the following guides to determine the specific product number you require.Example: 251-FWASVYAAThis example part numer describes a 251 model gas flow meter, factory revision F, with a stainless steelbody, 9 Pin “D” (CE) PC board connector, 0-5 Vdc setpoint and output signal, Viton ® elastomers and1/4" A-LOK ® fitting.Example: 2201AAAVC1AAThis part number describes a 2201 model gas flow meter, factory revision A, with an aluminum/brass body,0-5 Vdc setpoint and output signal, Viton ® elastomers, and 1/8" female NPT fitting.251-FWASVYAA2201AAAVC1AAModelSeeCapacityTableRevisionLevel(FactorySpecified)PC BoardConnectorF CardEdgeK 9 Pin “D”R CSAApprovedCableX No PCBoardW 9 Pin “D”(CE)100 – 20032002200•••••BodyMaterialsA Aluminum,BrassS 316 StainlessSteelSetpoint/Output SignalA 0-5 Vdc/0-5 VdcB 1-5 Vdc/4-20 mAdc(sinking)E 0-10 Vdc/0-10 VdcH 4-20 mAdc/4-20 mAdc(sourcing)X Notapplicable(valve only)100 – 20032002200• •• •• •• • ••100 – 20032002200The following page provides ordering informationfor Digital <strong>Mass</strong> <strong>Flow</strong> Meters/<strong>Control</strong>lers.• ••Elastomers(Valve Seat/O-Rings)B Buna N/Buna NE EPDM/EPDMMORFS = male O-ring face sealMMGFS = male metal gasket face sealA-Lok ® is a registered trademarks of the Parker Hannifin Corporation;CPI, UltraSeal and VacuSeal are trademarks of the Parker Hannifin Corporation.<strong>Flow</strong>Designator(Factory Specified)100 – 20032002200• • •• • •K Kalrez ® /Kalrez ® • •N Neoprene/Neoprene• • •V Viton ® • • •100 – 20032002200•SpecialFeaturesAA Factory Standard(Factory Specified)100 – 20032002200FittingSize/TypeA 3/8" CPI • •B 1/8" Compression • •C 1/4" Compression • •D 3/8" Compression • •E 1/2" Compression •F 1/2" CPI•G 3/4" Compression •H 10mm Compression • •I 1/4" CPI • •O 1/8" Female NPT •P 1/4" MMGFS •Q 3/8" MMGFS •S 1/2" MMGFS •U 3/8" A-LOK ® • •V 1/2" A-LOK ® •W 6mm Compression • •X No Fittings • •Y 1/4" A-LOK ® • •Z Special Fittings •1 1/8" Female NPT •2 3/4" A-LOK ® •2 1/8" Compression(brass)•3 12mm Compression •4 1/4" Compression(brass)•6 1/8" A-LOK ® • •7 1/8" CPI • •8 1/4" VacuSeal • •9 1/2" VacuSeal •– 6 –


Ordering InformationDigital <strong>Mass</strong> <strong>Flow</strong> Meters/<strong>Control</strong>lersUse the following guides to determine the specific product number you require.Example: 601-AAMSVYAAThis example part numer describes a 601 model gas flow meter, factory revision A, with a stainless steelbody, a standard response time (1 to 2 seconds), a Modbus (+24 Vdc) setpoint and output signal, Viton ®elastomers and 1/4" A-LOK ® fitting.Example: 3602AAAWVUAAThis part number describes a NEMA 4x, IP66 certified 3602 model gas flow meter, factory revision A, with astandard response time (1 to 2 seconds), a 0-5 Vdc (+24 Vdc) setpoint and output signal, Viton ® elastomersand 3/8" A-LOK ® fitting.601-AAMSVYAA3602AAAWVUAAModelSeeCapacityTableRevisionLevel(FactorySpecified)ResponseTimeA 1 to 2Seconds(Standard)B 500 msec(Optional)500 – 6003600The previous page provides ordering informationfor Analog <strong>Mass</strong> <strong>Flow</strong> Meters/<strong>Control</strong>lers.• ••BodyMaterialsS 316 StainlessSteel500 – 6003600Setpoint/Output SignalA 0-5 Vdc (+15 Vdc) • •B 0-5 Vdc (+24 Vdc) • •C DeviceNet (+15 Vdc) • •D DeviceNet (+24 Vdc) • •E 0-10 Vdc (+15 Vdc) • •F 0-10 Vdc (+24 Vdc) • •G 4-20 mAdc (sourcing)(+15 Vdc)• •H 4-20 mAdc (sourcing)(+24 Vdc)• •L Modbus (+15 Vdc) • •M Modbus (+24 Vdc) • •P Profibus DP (+24 Vdc) • •R Profibus DP (+15 Vdc) • •500 – 6003600MORFS = male O-ring face sealMMGFS = male metal gasket face sealA-Lok ® is a registered trademarks of the Parker Hannifin Corporation;CPI, UltraSeal and VacuSeal are trademarks of the Parker Hannifin Corporation.•Elastomers(Valve Seat/O-Rings)B Buna N/Buna NE EPDM/EPDM500 – 6003600• •• •K Kalrez ® /Kalrez ® • •N Neoprene/Neoprene• •V Viton ® • •500 – 6003600CertificationsW NEMA 4x, IP66Y NEMA 4x, IP66,Class 1 Div 2,Consult factory for IEC andATEX Certification availability.••SpecialFeaturesAA Factory Standard(Factory Specified)500 – 6003600FittingSize/TypeA 3/8" CPI • •B 1/8" Compression • •C 1/4" Compression • •D 3/8" Compression • •E 1/2" Compression • •F 1/2" CPI • •G 3/4" Compression • •H 10mm Compression • •I 1/4" CPI • •P 1/4" MMGFS • •Q 3/8" MMGFS • •S 1/2" MMGFS •U 3/8" A-LOK ® • •V 1/2" A-LOK ® • •W 6mm Compression • •X No Fittings • •Y 1/4" A-LOK ® • •Z Special Fittings • •2 3/4" A-LOK ® •3 12mm Compression • •6 1/8" A-LOK ® • •7 1/8" CPI • •8 1/4" VacuSeal • •9 1/2" VacuSeal •– 7 –


WARNING – USER RESPONSIBILITYFAILURE OR IMPROPER SELECTION OR IMPROPER USE OF THE PRODUCTS DESCRIBED HEREIN OR RELATED ITEMS CAN CAUSE DEATH, PERSONAL INJURYAND PROPERTY DAMAGE.This document and other information from Parker-Hannifin Corporation, its subsidiaries and authorized distributors provide product or system options for further investigationby users having technical expertise.The user, through its own analysis and testing, is solely responsible for making the final selection of the system and components and assuring that all performance,endurance, maintenance, safety and warning requirements of the application are met. The user must analyze all aspects of the application, follow applicable industrystandards, and follow the information concerning the product in the current product catalog and in any other materials provided from Parker or its subsidiaries or authorizeddistributors.To the extent that Parker or its subsidiaries or authorized distributors provide component or system options based upon data or specifications provided by the user, theuser is responsible for determining that such data and specifications are suitable and sufficient for all applications and reasonably foreseeable uses of the components orsystems.Offer of SaleThe items described in this document are hereby offered for sale by Parker-Hannifin Corporation, its subsidiaries or its authorized distributors. This offer and its acceptance aregoverned by the provisions stated in the detailed “Offer of Sale” elsewhere in this document or available at www.parker.com/offerofsale.© 2011 Parker Hannifin CorporationBulletin FM-1181 Rev C Jan 2012Parker Hannifin CorporationPorter Instrument Division245 Township Line RoadHatfield, PA 19440phone 215 723 4000fax 215 723 2199www.parker.comYour Local Authorized Parker Distributor

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