Standard Chambers Brochure - MDC Vacuum Products Corporation

engineered process solutions

• MDC’s New Standard Line of Chambersconsists of Spherical, D-Shaped, Cylindricaland Box Configurations• Available in Stainless Steel and Aluminum• Supplied with Electropolished surface finish• Mounting Bosses• Optional Support Frame2

ChambersStandard Cylindrical ChambersVer E ~ 07-06ULTRAHIGH & HIGH VACUUM SERIES3We offer the following sizes as Standard■ 24" Cylindrical Stainless Steel Chamber■ 18" Cylindrical Aluminum ChamberStandard Features■ 24" body constructed from 304L stainless steel■ 18" body constructed from 6061-T6 aluminum■ Electropolished surface finish■ Hinged door for quick and easy access to interior■ Frame mounting feetChambersStandard Cylindrical ChamberDescriptionMDC’s Standard Horizontal Cylindrical Chambers offer versatility fora wide range of applications where this is the desired configurationto meet the application need.The standard designs are a 24" diameter vessel constructed from304L stainless steel and an 18" diameter vessel constructed from6061-T6 aluminum. Both versions feature a Viton ® sealed quickopening hinged door for easy access to the interior of the chamber.A variety of different size access ports have been added to accommodateconnections for a number of devices such as pumps, analyticalinstruments, viewports, electrical and or motion feedthroughs,vacuum measurement gauges and other accessories.The stainless steel chamber is offered with Del-Seal metal sealingflanged while the aluminum version is offered with ISO KF & LF portflanges. Both versions are engineered to include support feet to facilitatesimple mounting to one of our standard frames or directly toyour working surface.MDC’s standard cylindrical chambers are designed for high vacuumservice but the stainless steel version can easily be configured forUHV service by replacing the Viton ® sealing front door with a wiresealing flange and changing the O-ring viewport to a Del-Sealflanged viewport. All sealing flanges and machined componentshave a standard 64 micro-inch surface finish. Seal surfaces aremachined with a 32 micro-inch concentric finish suitable for vacuumapplications.Fastening and sealing hardware can be located under the individualsize flange in the Flanges & Fittings section of the MDC catalog or onthe website.Standard Options■ Support Frame with leveling feet, p/n 220008Frame options available– Swivel casters & leveling feet– Working surface & lower shelf– Instrumentation mounting rack■ UHV configuration with wire sealing front doorand metal flanges (stainless steel version only)■ Double jacket water-cooling of the main cylinder■ Vertical orientations can also be configured■ Smaller or larger cylindrical diameters can beconfigured■ Alternate port options and locations availablePort Specifications■ 24" Stainless Steel Chamber – Del-Seal Ports2x 2.75" Top2x 6.00" Sides2x 8.00" Sides1x 10.00" Bottom1x 4" Viewport Door■ 18" Aluminum Chamber – ISO KF & LF Ports3x NW40 KF Top2x NW100 LF Sides2x NW200 LF Sides1x NW250 LF Bottom1x 4" Viewport Door8 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products, LLC

ChambersStandard Cylindrical ChambersVer E ~ 07-0624" Cylindrical ChamberTop View2x 14.002x 14.00(36.11)26.71Side View3x 12.00 3x 8.00Front View5.132x 14.0024.38 dia4x 15.0014.0014.5014.0014.504x 0.39 dia, thruUse with 220008 Stand2x 12.00 2x 12.0018" Cylindrical ChamberTop View3x 8.003x 8.0013.7527.50Side ViewChambersFront View18.50 dia3x 10.58DESCRIPTION4x 0.41 dia, thruUse with 220008 Stand12.5016.0016.50 18.0024" CYLINDRICAL CHAMBER - STAINLESS STEEL 25518" CYLINDRICAL CHAMBER - ALUMINUM 132WTLB4x 13.0012.00PART PRICEREFERENCE NUMBER $CHAM-CS-24 220005CHAM-CA-18 220007MDC Vacuum Products, LLC www.mdcvacuum.com Phone 800-443-88179

ChambersStandard Box ChambersVer E ~ 07-06HIGH VACUUM SERIES3We offer the following sizes as Standard■ 12" Sq x 18" Tall■ 24" Sq x 30" TallStandard Features■ 304L Stainless Steel body■ Electropolished surface finish■ Aluminum hinged door for easy access to interior■ Frame mounting feetChambersStandard Box ChamberDescriptionMDC Standard Box Chambers are offered in two size configurations.Both offer quick access to the inside via a hinged access front door.The doors are constructed out of light weight aluminum and are O-ringsealed. These chambers are versatile in design and can be used for awide range of deposition applications, analytical studies as well as otherresearch related experiments.Box chambers are available in either a 12" sq x 18" tall or 24" sq x 30"tall configuration. They are constructed from 304L stainless steel. Bothversions feature a variety of access ports of different sizes to accommodateconnection to a variety of experimental devices, analyticalinstruments, viewports, electrical and motion feedthroughs, vacuummeasurement gauge tubes as well as other accessories.Box chambers are welded out of plate stock thick enough to avoiddeflection. The plates are surface ground or mechanically polished toremove mill scale providing an excellent surface condition that minimizessurface area. Final cleaning of the chamber surface is done byelectropolishing removing any trace residue from the manufacturingprocess thus leaving the vacuum surface with a chromium rich conditionallowing for rapid pumpdown.Standard Options■ Support Frame with leveling feet, p/n 220008Frame options available– Swivel casters & leveling feet– Working surface & lower shelf– Instrumentation mounting rack■ Trace water-cooling■ Alternate sizes can be configured■ Alternate port sizes availablePort Specifications■ 12" Sq Box Chamber – Del-Seal Ports2x 2.75" Sides2x 4.50" Sides2x 6.00" Sides1x 8.00" Bottom1x 4" Viewport Door■ 24" Sq Box Chamber – Del-Seal Ports2x 2.75" Sides2x 6.00" Sides2x 8.00" Sides1x 10.00" Bottom2x 4" Viewport DoorAll 2-3/4 inch Del-Seal flanged ports are connected to the chamberwith oversized 1-3/4 inch outside diameter tubing to provide maximumapertures and allow the installation of larger devices. All access portsare precision aligned with a helium-neon laser during construction.Fastening and sealing hardware, including copper gaskets and bolt sets,are found under the individual size flange in the Flanges & Fittings sectionof the MDC catalog or on the website.WTDESCRIPTIONLB12" SQ X 18" TALL BOX CHAMBER 20724" SQ X 30" TALL BOX CHAMBER 930REFERENCECHAM-B-12CHAM-B-24PART PRICENUMBER $22000322000410 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products, LLC

ChambersStandard Box ChambersVer E ~ 07-0612"x12"x18" Box Chamber15.000.757.50 0.753x 6.502x 2.00Front ViewSide View10.5021.002x15.5019.002x11.002x4.502.501.00 11.004x 1.50Bottom View4x 3/8-24 UNF-2BUse with 220008 Stand11.7510.006.136.503x 2.50 13.001.003x 2.5024"x24"x30" Box ChamberFront View14.0028.001.131.123x12.002x 2.0010.0014.0034.00Side View2x25.0031.50Chambers22x17.002x8.00Bottom View3.28 18.944x 2.002.504x 1/2-13 UNC-2BUse with 220008 Stand24.7518.9412.193.003x 2.5012.7525.503x 2.50MDC Vacuum Products, LLC www.mdcvacuum.com Phone 800-443-881711

ChambersStandard Support FramesVer E ~ 07-06ACCESSORIES3We offer the following sizes as Standard■ 24" x 36" tabletop size■ 36" x 36" tabletop sizeStandard FeaturesChambersStandard Chamber StandDescriptionMDC Standard Chamber Support Frames are offered in two sizeconfigurations. These frames are versatile in design and can beused for our full range of Standard Chambers. The open frameallows access to all facets of a chamber and easy routing ofinstrumentation wiring.For portability, optional swivel casters can be added to the frame.Once relocated, leveling feet provide a stable and stationary workenvironment. The upper and lower frames may be fitted withshelving to provide a work surface and an equipment dock.A standard 19-inch electronics rack may be added to house acomplete system within a single frame.■ Open frame aluminum construction■ Adjustable leveling feet■ Frame 220002 used for both sizes of StandardSpherical Chambers– 12" Spherical, p/n 220000– 16" Spherical, p/n 220001■ Frame 220008 used for Standard D-Shape,Cylindrical and Box Chambers– D-Shape, p/n 220006– 24" Cylindrical, p/n 220005– 18" Cylindrical, p/n 220007– 24" Cylindrical, p/n 220005– 12" sq x 18" tall Box, p/n 220003– 24" sq x 30" tall Box, p/n 220004Frame Options■ Swivel casters & leveling feet■ Working surface & lower shelf■ Instrumentation mounting rackFrame OptionsOPTION -01 OPTION -02 OPTION -03DESCRIPTIONSWIVEL CASTERS & LEVELING FEETWORKING SURFACE & LOWER SHELFINSTRUMENTATION MOUNTING RACKOPTION PRICENUMBER $-01-02-0312 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products, LLC

ChambersStandard Support FramesVer E ~ 07-0624" x 36" Support Frame36.0024.00 15.0015.0026.62(2.87)36" x 36" Support Frame36.00Adjustable tomatch withchamber legs(3.00)1.5036.00AAdjustable tomatch withchamber legs1.41(2.81)Chambers.63 dia thruDetail A26.63(2.87)WTDESCRIPTIONLB24" X 36" SUPPORT FRAME 6636" X 36" SUPPORT FRAME 105REFERENCESTAND-2436STAND-3636PART PRICENUMBER $220002220008MDC Vacuum Products, LLC www.mdcvacuum.com Phone 800-443-881713

ChambersSurface Science AnalysisVer E ~ 07-06ULTRAHIGH VACUUM SERIES3Features■ Proven design■ 18 Access Ports■ Del-Seal CF metal seal flanges■ Precision component alignment■ All type 304 stainless steel construction■ Bakeable to 450°C■ UHV compatible to 1 x 10 -11 TorrSurface Science Analysis ChamberDescriptionPort AnglesO°ChambersThe SSAC-12 is a versatile, general purpose surface science analysischamber. It has proven to be suitable for a wide range of studiesand experiment. Standardization of the chamber design has enabledMDC to offer the SSAC-12 at this price.The chamber has a total of 18 access ports. In addition to the pumpport in the base, there are three 8", two 6", three 4-1/2" and nine2-3/4" ports with Del-Seal CF metal seal flanges. The SSAC-12has a 14-5/8" female wire seal flange on the pump port; the SSAC-12D is supplied with a 14" Del-Seal CF flange.The chamber access ports accommodate a variety of experimentaldevices, analytical instruments, viewports, feedthroughs and otheraccessories. Note that the 2-3/4" flanges connect to the chamberwith oversize 1.75" O.D. tubing to accommodate larger devices.Access ports are precision aligned with a helium-neon laser duringconstruction. Each is oriented toward one of three internal referencepoints A, B and C, or a vertical centerline. Angles and distances tothese points are listed in the table.Chamber construction is of type 304 stainless steel. All flange andtube connections are TIG fusion welds. All internal surfaces are electropolishedto ultrahigh vacuum standards. Connection hardware,including copper gaskets and bolt sets, are found under the individualsize flange in Section 1.1 of the MDC catalog.Ports with colored flanges are unique to a single focal point. Ports tofocal point A are shown in magenta; ports to focal point B are shownin purple; and ports to focal point C are shown in cyan. Ports whichhave more than one focal point or no listed focal point are shownwithout color. Focal length dimensions for ports with more than onefocal point are given to the first focal point intersection.25°A B C1455°Cutting planeFocalplane• The polar angle of a port is measured in a vertical plane that includes thefocal point of the port and the centerline of the port• The azimuthal angle of a port is measured as a projection of the portcenterline onto a horizontal plane that includes the focal point of the port• Example: Port 14 is aimed at focal point CThe cutting plane is vertical and passes through CThe cutting plane is rotated about a vertical line through Cto include the centerline of Port 14• The polar angle of 25° is measured in the cutting plane• The azimuthal angle of 55° is measured in the focal planeO°14 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products, LLC

ChambersSurface Science AnalysisVer E ~ 07-06Top ViewZYAzimuthal angle0° to 360°Xo°7 5 6 161514Side ViewYZX166115 158A B C21-1/4Overalldepth1413112.00 dia94113111218 9 2 12 314.00 radius3 2 178.00Polar angle0° to 180°42.002.00Front Viewo°ZY718102X89(0,0,0)2.0012 14A B C25-1/2Overallwidth2.00171331112.00Ports List17-1/8OverallheightPORT FLANGE TUBE FOCAL FOCAL AZIMUTHAL POLARNO. SIZE O.D. POINT LENGTH ANGLE ANGLE1 6 4.00 B 7.50 0 02 8 6.00 B 7.50 270 903 2-3/4 1.75 B 7.25 315 904 8 6.00 A 11.50 180 905 6 4.00 A 7.25 90 906 4-1/2 2.50 A 8.50 90 407 2-3/4 1.75 A 8.25 135 358 2-3/4 1.75 A 6.50 180 239 4-1/2 2.50 A 9.50 270 3510 2-3/4 1.75 B1 7.25 220 9011 8 6.00 C 10.00 0 9012 2-3/4 1.75 C 9.00 270 3513 2-3/4 1.75 C 6.50 0 2314 2-3/4 1.75 C 9.00 55 2515 4-1/2 2.50 C 13.75 90 11016 2-3/4 1.75 C 7.75 90 4017 1 14 12.00 B 8.00 0 18018 2-3/4 1.75 B2 7.25 220 90Focal Points (x,y,z)A -2.00, 0.00, 8.00 B1 0.00, 0.00, 6.00B 0.00, 0.00, 8.00 B2 0.00, 0.00, 10.00C 2.00, 0.00, 8.00 (Note: B1 & B2 not shown)Chambers1 Also available with 14-5/8" O.D. Female Wire Seal Flange.WTDESCRIPTIONLBSURFACE SCIENCE ANALYSIS CHAMBER WITH 14-5/8" FEMALE WIRE SEAL FLANGE ON PORT 17 80SURFACE SCIENCE ANALYSIS CHAMBER WITH 14" DEL-SEAL FLANGE ON PORT 17 80REFERENCESSAC-12SSAC-12DPART PRICENUMBER $200000200001MDC Vacuum Products, LLC www.mdcvacuum.com Phone 800-443-881715

ChambersBell Jar SystemsVer E ~ 07-06Stainless Steel Bell JarsBase Wells3ChambersTypical stainless steel bell jar system■ Stainless steel bell jars■ Feedthrough collars■ Baseplates■ Base wellsMDC stainless steel bell jars are designed foruse with MDC baseplates, base wells andfeedthrough collars. A dovetail groove in thejar’s base flange holds a Viton ® elastomergasket, which makes the vacuum seal withone of the forementioned components. Allstainless steel bell jars are fitted with a fourinch view diameter Pyrex ® viewport. Allvacuum welds are internal and provide UHVcompatibility. For added convenience, all belljars are fitted with a hoist or lift-ring that iswelded to the chamber’s domed top. Thesechambers can be purchased with an optionalelectropolished finish.Feedthrough CollarsMDC feedthrough collars are used to expandthe capabilities of conventional bell jars byproviding radially oriented access ports. Four,eight, or eighteen ports fitted with either2-3/4 inch Del-Seal CF metal seal flangesor ISO KF NW40 Kwik-Flange flanges areavailable. These ports accept a variety ofstandard MDC vacuum components such aselectrical, fluid and motion feedthroughs.Installation of a feedthrough collar alsorequires the use of an MDC baseplate. Thefeedthrough collar is positioned between abell jar and the baseplate. The feedthroughcollar / baseplate seal is made with either anL-gasket or circular cross section elastomer,depending on which collar model is used.The feedthrough collar seal is made with anL-gasket elastomer. Stainless steel bell jarswould use a circular cross section elastomerin the jar’s dovetail groove to make this seal.BaseplatesBase wells are the product of integratingboth a baseplate and a feedthrough collar.They provide the functionality of bothcomponents and replace one vacuum sealwith a weld joint. They are available withradially oriented access ports in four, eight,or eighteen port configurations and are fittedwith either 2-3/4 inch Del-Seal CF metalseal flanges or ISO KF NW40 Kwik-Flangeflanges. These ports accept a variety ofstandard MDC vacuum components such aselectrical, fluid and motion feedthroughs.Both baseplates and base wells connect tothe vacuum pumping system with a choiceof standard smooth face ASA ANSI flanges,optional Del-Seal CF metal seal flanges orISO LF bolt-style Large-Flange flanges.Gasket seals for any flange or port are notincluded with baseplates or base wells andmust be purchased separately. For pumpport or access port flange hardware, refer toindividual flange specifications in theFlanges & Fittings section of the MDCcomplete catalog or visit our website.MDC base plates are required for installationof both bell jars and feedthrough collars.They provide a flat and stable platform uponwhich bell jar systems can be built.Baseplates are typically mounted atop avacuum pump or the gate valve fitted to thepump. MDC offers three baseplate interfaceflanges for mating with standard pumps orgate valves. Interface flanges include ANSIASA elastomer seal flanges, Del-Seal CFmetal seal flanges and bolt styleLarge-Flange ISO LF elastomer sealflanges. Baseplates are available withbaseplate flange diameters suitable for 12,18 and 24 inch chamber body diameters.All dimensions in this catalog are given ininches unless specified otherwise.16 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products, LLC

ChambersBell Jar SystemsVer E ~ 07-06Typical bell jar chamber installationStainless steel bell jars arefound on page 18Stainless steel bell jar page 18O-rings are on page 19Multi-port feedthrough collarsbegin on page 20Multi-port feedthrough collar page 20L-gaskets are on page 21Baseplates and Base Wells arefound on page 22Gate valves are in Section 2.1 of the MDCcatalog.ChambersBaseplate page 22Cryogenic Sorption roughingpumps are in Section 3.2 ofthe MDC catalog —High vacuum pumps arecustomer supplied.Typical configuration shown without connecting hardware for clarityBase well page 22MDC Vacuum Products, LLC www.mdcvacuum.com Phone 800-443-881717

ChambersStainless Steel Bell JarsVer E ~ 07-06HIGH VACUUM SERIESFeatures■ 304ss material■ Viton ® gasket seal■ Three standard sizes■ Pyrex ® viewport PVP-431717Side viewNominal diameterStainless Steel Bell JarDescriptionType 304 Stainless Steel Bell Jars are designed to be used with flatBaseplates, Base Wells and Feedthrough Collars. A dovetail groove inthe jar’s base flange holds a Viton ® O-ring, supplied with each unit,which makes the vacuum seal with a baseplate. A PVP-4 Pyrex ®Viewport with a four-inch diameter viewing area is included. Allwelds are internal. A single top-center lift ring is included.Electropolished finish option is available.ViewportChambers.970Front viewLift ringSpecifications.188MaterialBell Jar304ssGasket, elastomer Viton ®SealGasket, elastomerO-ringMethodGravityVacuum Range1x10 -6 TorrTemperature Range Ambient to 150°CWeight & DimensionsSee tableHeightFlange O.D.Viewportheight18 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products, LLC

ChambersStainless Steel Bell JarsVer E ~ 07-06NOM. FLANGE HEIGHT VIEWPORT WT17 SIZE I.D. O.D. W/O RING HEIGHT LB REFERENCEBell Jar12 12.00 14.00 12.00 6.00 65 SSBJ-1218 18.00 20.00 30.00 12.00 195 SSBJ-1824 24.00 26.00 30.00 12.00 250 SSBJ-24PART PRICENUMBER $5240005240015240023682O-ringUse with Stainless Steelbell jarI.D.Viton ® materialThree standard sizes32271/4" WAlso used with stainlesssteel FeedthroughCollars on page 20NOMINAL NOMINAL WTSIZE I.D. LBREFERENCEPART PRICENUMBER $10 12-1/2 1/812 18-1/2 1/818 25 1/8OR-12OR-18OR-24521003521004521005ChambersViewport sparesWTDESCRIPTIONLBREPLACEMENT GLASS, 7740 PYREX OPTICAL 5" O.D. 1BOLT, SOCKET HEAD, STAINLESS STEEL, .250-28 x 1" LONG (Pkg of 4) 1/4O-RING, GLASS-TO-FLANGE 1/4O-RING, GLASS-TO-RETAINER 1/4REFERENCE----PART PRICENUMBER $0450101901660413460412433554For viewport details, see the MDC catalog or visit our website.MDC Vacuum Products, LLC www.mdcvacuum.com Phone 800-443-881719

ChambersFeedthrough Collars11-Jun-99Ver E ~ 07-06HIGH VACUUM SERIES3171719O-ring sealedAtypFeedthrough Collar, O-ring sealedBtyp3.006.000All portflangesfixedGroove I.D.1.62typFeedthrough collar, L-gasket sealedChambersFeatures■ Choice of 2-3/4" Del-Seal CF flange orKwik-Flange KF port connections.■ All type 304 stainless steel construction■ Elastomer seal on collar, one includedL-gasket sealedAB3.00DescriptionStandard MDC Feedthrough Collars add four or eight convenientfeedthrough ports to bell jar vacuum systems. These ports accepta variety of feedthrough devices and other components mountedon mating Del-Seal CF 2-3/4" flanges or ISO NW40 Kwik-Flange KF ports.Installation of a feedthrough collar is made by positioning itbetween a bell jar and a baseplate. The lower collar-to-baseplateseal is made with either a Viton ® L-gasket or O-ring, depending onwhich collar model is used. With Stainless Steel Bell Jars, a Viton ®O-ring in the jar’s dovetail groove makes the seal.One O-ring or L-gasket is included with each collar. Dimensionsand reordering information are found on the next page.6.000All portflangesfixedFlange O.D.• Drawings show collars with four Del-Seal CF ports.• All collar walls are nominally 3/16" thick.1.62typ20 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products, LLC

ChambersFeedthrough CollarsVer E ~ 07-0617O-ring sealed3216NOM. NO. PORT FLANGE ISO O-RING WTSIZE PORTS O.D. REF. A B GROOVE I.D. LBDEL-SEAL CF PORTS12 4 2.73 - 14 11 12.50 6518 8 2.73 - 20 16 18.50 15024 8 2.73 - 26 23 25.00 230REFERENCEFTCO-12FTCO-18FTCO-24PART PRICENUMBER $523002523003523004KWIK-FLANGE KF PORTS12 4 2.16 NW40 14 11 12.50 5018 8 2.16 NW40 20 16 18.50 8524 8 2.16 NW40 26 23 25.00 130FTCO-K150-12FTCO-K150-18FTCO-K150-24523022523025523028L-gasket sealedNOM. NO. PORT FLANGE ISO FLANGE WTSIZE PORTS O.D. REF. A B O.D. LBREFERENCEPART PRICENUMBER $3664DEL-SEAL CF PORTS12 4 2.73 - 14 11 12.5 3518 8 2.73 - 20 16 18.5 65KWIK-FLANGE KF PORTS12 4 2.16 NW40 14 11 12.5 3518 8 2.16 NW40 20 16 18.5 60FTC-12FTC-18FTC-K150-12FTC-K150-18523000523001523031523034SealsO-ringI.D.1/4" WViton ® materialThree standard sizes foreach type seal3223L-gasketI.D.Chambers.750.375.093NOMINAL NOMINAL WTSIZE I.D. LBREFERENCEPART PRICENUMBER $O-RING10 12-1/2 1/812 18-1/2 1/818 25 1/8OR-12OR-18OR-24521003521004521005L-GASKET10 9-1/4 1/412 11-1/2 1/418 17-1/4 1/4GVL-10GVL-12GVL-18521000521001521002MDC Vacuum Products, LLC www.mdcvacuum.com Phone 800-443-881721

ChambersBaseplates & Base WellsVer E ~ 07-06MatingChamberdeterminesnominalsizeHIGH VACUUM SERIESMatingChamberNominalSize33171717BaseplateA.953.06ChambersBaseplate and Base WellFeatures■ 2-3/4" Del-Seal CF flange or Kwik-FlangeKF NW 40 port connections on Base Wells■ Standard ASA pump port flange, with optionalDel-Seal CF or ISO Large-Flange LF port■ All type 304 stainless steel construction■ Elastomer seal surfaceDescriptionInstallation of a Baseplate is made by positioning a Bell Jar orFeedthrough Collar directly on top of it. The bell jar-to-baseplateseal is made with either a Viton ® L-gasket or O-ring, depending onwhich Bell Jar or Feedthrough model is used.Standard MDC Base Wells are the integral combination of aFeedthrough Collar and a Baseplate, and eliminate one vacuumseal with a weld. Base Wells add four, eight, or eighteen convenientfeedthrough ports to bell jar vacuum systems. These ports accepta variety of feedthrough devices and other components mountedon mating Del-Seal CF 2-3/4" flanges or Kwik-Flange KFNW40 sizes. If access ports are not required, Bell Jars can bemounted directly on Baseplates. Both Baseplates and Base Wellsconnect to the vacuum pumping system with a choice of standardsmooth face ASA ANSI flange, or optional Del-Seal CF metal sealflange or Large-Flange LF bolt-style.Seals for any flanges or ports are not included with Baseplates orBase Wells. For pump port flange or side port flanges, refer to individualflange specifications in Section 1 of the MDC catalog.6.123.06Base WellAll portflangesfixedASAflangeASAflange —shown rotated 22.5°,side ports split ASAbolt holesASA Pump Port FlangeABNom. Size Tube O.D. Wall12 6.00 .18818 & 24 8.00 .1883.001.62typNom. Size Tube O.D. Wall12 6.00 .18818 & 24 8.00 .188NOMINAL ANSI ASA ASA NO. HOLE BOLTSIZE REF. DIA. THK. HOLES DIA. CIRCLE12 4 9.00 .50 8 .75 7.5018 & 24 6 11.00 .75 8 .81 9.50• ASA flanges are nonrotatable with a smooth face.• O-ring grooves may be added as a special configuration.• Base and port seals not included.22 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products, LLC

ChambersBaseplates & Base WellsVer E ~ 07-06BaseplateNOMINAL PUMP ASA WTSIZE PORT O.D. A LB12 ANSI-4 9.00 14 5518 ANSI-6 11.00 20 11024 ANSI-6 11.00 26 185REFERENCEBP-12BP-18BP-24PART PRICENUMBER $523008523009523010Base WellNOMINAL PUMP NO. PORT FLG. ISO WTSIZE PORT PORTS O.D. REF. A B LBREFERENCEPART PRICENUMBER $3675DEL-SEAL CF SIDE PORTS12 ANSI-4 4 2.73 - 14 11 8018 ANSI-6 8 2.73 - 20 16 16024 ANSI-6 8 2.73 - 26 23 250BW-12BW-18BW-24523005523006523007KWIK-FLANGE KF SIDE PORTS12 ANSI-4 4 2.16 NW40 14 11 7718 ANSI-6 8 2.16 NW40 20 16 15424 ANSI-6 8 2.16 NW40 26 23 237BW-K150-12BW-K150-18BW-K150-24523050523053523056Pump Port OptionsDel-Seal CF3697 B3.20 Nonrotatable withclearance holesNOMINAL MDC FLANGE FLANGE NO. HOLE BOLTSIZE REF. DIA. THK. HOLES DIA. CIRCLE12 F800600 7.97 .880 20 .332 7.12818 & 24 F1000800 9.97 .970 24 .332 9.128CHAMBERNOM. SIZE1218 & 24OPTION PRICENUMBER $-01-03Provides mating flange to metalsealedport on vacuum pump.Optional elastomer seals available.See §1.1 of MDC catalog for flangespecifications and sealing methods.Add option number to standard partnumber. Example: 523008-01ChambersLarge-Flange LF3691 B2.95Nonrotatable withclearance holesNOMINAL ISO FLANGE FLANGE NO. HOLE BOLTSIZE REF. DIA. THK. HOLES DIA. CIRCLE12 NW160 8.86 .63 8 .43 7.8718 & 24 NW200 11.22 .63 12 .43 10.24CHAMBERNOM. SIZE1218 & 24OPTION PRICENUMBER $-02-04Provides mating flange to standardISO port on vacuum pump. See §1.2of MDC catalog for flange specificationsand sealing methods. Addoption number to standard part number.Example: 523008-02MDC Vacuum Products, LLC www.mdcvacuum.com Phone 800-443-881723

CustomEngineeringChamber Geometry 26Modifications to Standard Parts 2825

ChambersChamber GeometryVer E ~ 07-06360° scale. Azimuthal angle is a port’sangular displacement about a vertical axis.This vertical axis intersects the port’s focalpoint and is always parallel to thechamber’s main Z axis. The azimuthal angleis projected onto the port’s horizontal focalplane and measured in a counterclockwisedirection beginning at the 0° or threeo’clock position and ending at the portcenter line or center line projection. If a porthas a polar angle equal to 90°, figure 4, theport’s center line will lay on the focal plane.If the polar angle is less than or greater than90°, figures 5 and 6, the port’s centerlinewill be above or below the focal plane andmust be projected onto it for a finalazimuthal angle measurement.Custom engineered chambers aredesigned and manufactured using state ofthe art metal machining equipment as wellas conventional machining and weldingtools. Unless specified otherwise the typicaldimensional tolerances applied to allchamber fabrications shall be as follows...Chamber fabrication tolerances havebeen optimized for cost-effectiveness andreproducibility. Chambers 24 inches inlength or shorter will carry a ± 0.03 inchlinear tolerance. Chambers longer than 24inches but shorter than 72 inches will carrya ± 0.06 inch linear tolerance. All chamberswill carry a minimum ± 1.0° angulartolerance. Deviations from thesespecifications must be discussed with theMDC technical sales engineers for feasibilityand cost before they can be implemented.Figure 4180°270°Polarangle0°ZA180°AzimuthalangleYReferencePlaneX90°0°Figure 3 Spherical Coordinate SystemZFigure 5Polarangle0°ZFocal Length 1Port 5AzimuthalangleBPort 4A180°Y90°Focal Length 2Port 1BCFocal Length 4270°180°ReferencePlaneX0°ChambersPort 2Port 3Focal Length 3YFigure 6Polarangle0°ZPolarangle(0,0,0)Reference PlaneAzimuthalangleC(AzimuthalanglePort 6X180°Y90°ReferencePlaneGeneral chamber nomenclature270°180°X0°MDC Vacuum Products, LLC www.mdcvacuum.com Phone 800-443-881727

ChambersModifications to Standard PartsVer E ~ 07-06Typical MDC custom multiport flange assembly.See the MDC catalog or visit our website forsimilar flanges.MDC’s technical sales engineers areavailable to discuss your requirements forany non-standard component. In the casewhere a catalog item may be close to yourneeds, but would benefit from a slightmodification, the requirements could beeasily noted using the existing catalogdrawing. Locate the catalog page of theproduct to be modified. Provide the pagenumber, a reference number if it’s available,and a brief description of the modificationrequirements along with a marked up copyof the catalog drawing. Product specificdrawings are available for most productsdepicted in this catalog and are usuallypresented with the table for those products.MDC is equipped to build custom vacuumcomponents of virtually any complexity. Inthe case where there is no standardcomponent close to your needs, it will benecessary to generate a drawing. Customcomponents can be built to your exactspecifications from a rough hand-sketch,detailed computer-generated engineeringdrawings or anything in-between. MDC usesSolidWorks 3D CAD software and canreceive drawings electronically in many fileformats. For a nominal fee MDC can supply acomplete engineering documentationpackage on those projects for whichdrawings were not provided by thecustomer.325One example of the multiple ways to specify a custom componentChambersThe flange assembly at right depicts fourpopular methods of installing flanges in to alarger flange or plate. Del-Seal CF metalseal flanges have been used for the purposeof this example. The methods describedwould apply to most any flange type andconfiguration. The four methods ofconstruction are referred to as standardtubulated, top flush mounted, zero lengthrecessed and single piece integrallymachined. These are given as examples forcommonly asked questions. Discussing yourapplication with an MDC technical salesengineer will help determine the appropriatesolution for your application.Flush MountZero LengthTubulatedMachinedThe tubulated method of construction wouldbe one in which a standard or customhalf-nipple is welded to the larger flange atthe tube end. The larger flange or plate iscounter-bored to match the tube’s inside andoutside diameters. The tube to flangetransitions are welded in the same fashionalong the bore’s inside diameter. Thismethod of construction allows the use ofclearance hole, bolt and nut fasteners, and isthe only configuration that would allow theuse of a rotatable flange.TubulatedInternal weldInternal weldI.D.28 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products, LLC

ChambersModifications to Standard PartsVer E ~ 07-06The most economical method of installing aflange would be to use standard off the shelfcomponents requiring the minimum amountof modification and fabrication or in otherwords a top mounted method. In this methodthe larger flange or plate is bored to matchthe bore size of a smaller flange. Both arethen joined by fusion welding internally alongthe interface between the two bored pieces.In some cases, external skip welds areprovided for additional mechanical strength.This is the most economical method ofconstruction.Flush MountInternal weldI.D.The zero length method of installation issimilar to the top mount method with oneexception, the larger flange or plate iscounter-bored to a depth that matches thethickness of the smaller flange. Thecounter-bore is used to reduce the overallthickness of the completed assembly andthus provides a zero length recessed profile.The flanges are welded in the same fashionalong the bore inside diameter. Thisapproach provides a more aesthetic look at areasonable cost.Zero LengthInternal weldCounterbore to acceptsmaller flangeI.D.ChambersAn integrally machined method eliminates allweld joints, but requires the most amount ofmachining. Special machining steps includethe use of blind-tapping for all bolt holes andoff-center turning of the knife-edge sealgeometry as well as through boreoperations. In some instances it may evenbe desirable to use helical thread inserts,since these would be easy to replace in theevent a thread is damaged. Conventionalthreads would be very difficult to repair. Thistype of fabrication is the most aesthetic, butalso the most expensive of the threechoices.MachinedSmaller flange detail machined into air-sideof larger flange, including blind tapped holesI.D.MDC Vacuum Products, LLC www.mdcvacuum.com Phone 800-443-881729

VACUUM PRODUCTS, LLCVACUUM PRODUCTS, LLCVACUUM PRODUCTS, LLCOrdering InformationVer E ~ 07-063Visit mdcvacuum.comto order online and for all of the latest pricing, new productand sales representative contact information.Access over 5,000 parts online –Thousands of components in-stock and ready toship today!WWW.MDCVACUUM.COMOur entire product line is featured online, with most updated pricing andinventory. Register and you will have access to ordering online as wellas documents from our FAQ and technical library archives.Contact USWe have a highly trained sales and support staff who areknowledgeable about our products and willing and able to help youmake an informed buying decision, and even assist you after the sale.SalesPhone: 800 443-8817Fax: 510 887-0626e-mail: sales@mdcvacuum.comChambersAKMDC DirectMDC DirectSemi Account ManagerMary Osborne510-209-2331MOsborne@mdcvacuum.comMDC DirectMDC only - SF-East BayRose Kaslin800-443-8817websales@mdcvacuum.com= Call MDC DirectVACUUM PRODUCTS, LLC(800-443-8817)Power ConnectionVal Robinson408-779-8888vrobinson@powerconnectioninc.comTorvacSteve Borden763-544-0888sales@torvac.comVacuum OneScott Dix773-244-3102information@vacuumone.comStavacDave Stapleton724-586-2100dave@stavac.comCanadaIntIvac905-873-0166sales@intlvac.comPTL VacuumBill Branagan315-776-5040sales@ptlvacuum.comHartech CorporationSteve Harvell781-863-1448hartech1@ix.netcom.comPower ConnectionNorthern CA from Oregon bordersouth to and includingVentura Co.-ISINorthern SF Bay to Oregon Border andsouth to and includingSan Luis Obisbo-MDCVal Robinson408-779-8888vrobinson@powerconnectioninc.comAVTECSo. CA for MDC and ISI;Ventura Co. MDC onlyClyde Madsen949-499-6600clyde@teamAVTEC.com# 4MDC DirectRick Appel303-249-0327rappel@mdcvacuum.comScientific Sale & Support, Inc.Mike Rider505-345-9680m1053ride@yahoo.comTelesis T H High h VVacuumRob Armstrong972-726-6960rob@telesishivac.com# 7Enviro-Vac SystemsJames Johnson865-212-3626jjohnson@enviro-vacsystems.comEastern VacuumRich Glazewski215-822-6398EasternVacuum@Verizon.netTriangle VacuumBrian McGlynn919-362-3790trianglevacuum@gmail.comEffective 9/4/0930 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products, LLC

Ordering InformationVer E ~ 07-06Shipping MethodWarrantyAll standard shipments are made by thefollowing method unless otherwise specified:• FOB Hayward, California;• prepay and added to invoice (PPA);• shipped via UPS ground service or bestway as determined by MDC.Nonstandard shipments must be specified bythe customer. General notes include thefollowing:• orders may be specified to ship collect;• charges for nonstandard methods ofshipping are determined by the specifiedcarrier;• in some cases, oversized items may becharged at a “dimensional weight” (dimweight)rate which is substantially higherthan surface rates.MDC recommends in all cases that analternative carrier be named at the time oforder.Weights stated in this catalog are forreference only. Exact shipping weights aredetermined at the time of shipment.Payment TermsNet 30 days with prior credit approval.VISA ® , MasterCard ® and American Express ®credit cards, prepaid, are also accepted.Prices and SpecificationsPrices and specifications are subject tochange without notice.DeliveryEvery effort will be made to ship within three(3) days of receipt of an order. In the event ofback-order, a firm delivery date will beestablished and quoted.All products manufactured by MDC VacuumProducts, LLC are warranted to be free fromdefects in materials and workmanship for aperiod of twelve (12) months from the dateof shipment by MDC Vacuum Products, LLCto the buyer. Liability under this warranty isexpressly limited to repair or replacement ofdefective products at the option of MDCVacuum Products, LLC. Products returned toMDC Vacuum Products, LLC for repair orreplacement shall be received prepaid.Expendable items such as gaskets, bellows,bearings, lubricants, etc., may have a servicelife of less than one year in normal usage. Ifsuch items fail to give reasonable service fora period of time, as determined by MDCVacuum Products, LLC, they will be repairedor replaced by MDC Vacuum Products, LLCat its election.Return PolicyIn the event that a product is to be returnedto MDC, a Return Authorization (RA) numbermust be obtained from the MDC SalesDepartment prior to shipment of the product.Call the toll free number listed at the bottomof this page and request an RA number. Tofacilitate processing, please provide theoriginal date of purchase and either theoriginal purchase order number or theoriginal MDC sales order number.Products returned to MDC Vacuum Products,LLC for repair or replacement shall bereceived prepaid. Items arriving without aReturn Authorization number will be refused.A product failing to give reasonable servicefor a period of time, as determined by MDCVacuum Products, LLC, will be repair ed orreplaced by MDC Vacuum Products, LLC atits election.ChambersCopyright © 2010 MDC Vacuum Products, LLC.Reproduction in any manner, in whole or in part,in English or in other languages, is prohibited.All rights reserved.All dimensions in this catalog are given ininches unless specified otherwise.MDC Vacuum Products, LLC www.mdcvacuum.com Phone 800-443-881731

23842 Cabot BoulevardHayward, CA 94545-1661Phone 510.265.3500Toll-Free 800.443.8817Fax 510.887.0626EmailWebsales@mdcvacuum.comwww.mdcvacuum.com