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A Space Coronagraph Mission for Exoplanet Imaging and ...

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All coronagaphs require de<strong>for</strong>mable mirrors<strong>for</strong> precise wavefront controlHCIT experiments have been carried out withXinetics DMs. Fused silica facesheet is polishednominally to λ/100 rms. Surface figure (openloop) has been shown to be settable to 0.05 nmrms <strong>and</strong> stable to 0.01 nm rms over periods of 6hours or more in a vacuum testbed environment.Protoflight qualification is in progress at JPL.MEMS DMs manufacturedby Boston Micromachines(left) <strong>and</strong> IRIS-AO (right)can be configured witheither continuous orsegmented mirrorfacesheets. MEMS DMs areactively in use in alltestbeds other than HCIT.

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