Development Update of High Index Lens Material LuAG - Sematech
Development Update of High Index Lens Material LuAG - Sematech
Development Update of High Index Lens Material LuAG - Sematech
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SCHOTT Lithotec <strong>High</strong> <strong>Index</strong> <strong>Lens</strong> <strong>Material</strong> <strong>LuAG</strong><br />
LIF (Laser Induced Fluorescence) shows improvement on<br />
crystal quality and confirm the reduction <strong>of</strong> impurities<br />
May 08<br />
12 5 th Intern. Immersion Symposium<br />
22-25.9.2008, The Hague, NL,<br />
LIF signal normalized to STE<br />
10<br />
9<br />
8<br />
7<br />
6<br />
5<br />
4<br />
3<br />
2<br />
1<br />
0<br />
New Champion<br />
May 08<br />
150 250 350 450 550 650 750 850<br />
Lambda [nm]<br />
� Reduction <strong>of</strong> high background between ~300 and ~550 nm – attributed to<br />
improved crystal perfection<br />
� LIF is used for the optimization <strong>of</strong> the growth atmosphere<br />
Sept 08
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