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Development Update of High Index Lens Material LuAG - Sematech

Development Update of High Index Lens Material LuAG - Sematech

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SCHOTT Lithotec <strong>High</strong> <strong>Index</strong> <strong>Lens</strong> <strong>Material</strong> <strong>LuAG</strong><br />

New 80mm dia crystal shows homogenous low<br />

absorption <strong>of</strong> 0.062 to 0.068<br />

� Very homogeneous transmission<br />

� Variation top – bottom below 10%<br />

9 5 th Intern. Immersion Symposium<br />

22-25.9.2008, The Hague, NL,<br />

sample position as grown<br />

K ini @ 193nm<br />

cm -1<br />

(bulk + surface)<br />

1 cone 0.062<br />

2<br />

3<br />

4<br />

5<br />

top<br />

top<br />

bottom<br />

bottom<br />

0.062<br />

0.062<br />

0.066<br />

0.068

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