Development Update of High Index Lens Material LuAG - Sematech
Development Update of High Index Lens Material LuAG - Sematech
Development Update of High Index Lens Material LuAG - Sematech
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SCHOTT Lithotec <strong>High</strong> <strong>Index</strong> <strong>Lens</strong> <strong>Material</strong> <strong>LuAG</strong><br />
Absorption Roadmap <strong>LuAG</strong> 9/08<br />
Absorption [cm -1 ]<br />
10<br />
1<br />
0,1<br />
0,01<br />
0,001<br />
3,7<br />
2,5<br />
1,5<br />
0,9<br />
0,63<br />
20 5 th Intern. Immersion Symposium<br />
22-25.9.2008, The Hague, NL,<br />
Feasibility<br />
Crystal dia < 50mm<br />
0,2<br />
Demonstrator<br />
Crystal dia 80mm<br />
0,12<br />
Lab Scale<br />
Crystal dia 22mm<br />
0,1<br />
Experimental data Step 1<br />
Experimental data Step 2<br />
0,05 0,05<br />
0,035<br />
Mai-05 Dez-05 Jul-06 Jan-07 Aug-07 Feb-08 Sep-08 Mrz-09 Okt-09<br />
Target<br />
Final Target<br />
A
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