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Mad City Labs Catalog of Nanopositioning Systems ...

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Nano-Align6 Series<br />

Product Description<br />

82<br />

Features Typical Applications<br />

� Low pr<strong>of</strong>i le<br />

� Six axis motion (XYZ θ X θ Y θ Z)<br />

� 100 μm x 100 μm x 100 μm x 1.1 mrad x<br />

1.5 mrad x 5 mrad ranges <strong>of</strong> motion<br />

� 200 μm x 200 μm x 200 μm x 2.3 mrad x<br />

3.0 mrad x 5 mrad ranges <strong>of</strong> motion<br />

� Center aperture: 35mm diameter<br />

� Closed loop control<br />

� sensor technology<br />

Nano-Align6 constructed from aluminum.<br />

Th e Nano-Align6 is a six axis (X, Y, Z, θ X , θ Y, θ Z) nanopositioning<br />

system with a large center aperture. Th e<br />

Nano-Align6 is ideal for alignment applications which<br />

require three linear axes <strong>of</strong> motion (X, Y, Z) combined<br />

with rotational motion about each axis. Th e large<br />

aperture provides excellent access for microscopy optics,<br />

� Alignment<br />

� MEMS<br />

� Nanolithography<br />

� Metrology<br />

LabVIEW Compatible<br />

USB Interfaces<br />

Examples, tutorial, and<br />

Nano-Route ®<br />

3D supplied<br />

with Nano-Drive ®<br />

USB<br />

interfaces.<br />

sample holders, and probe placement. Th e Nano-Align6<br />

includes internal sensors on every axis using <strong>Mad</strong> <strong>City</strong><br />

<strong>Labs</strong>’ proprietary -------- technology for absolute position<br />

measurement and picometer/nanoradian accuracy<br />

under closed loop control.<br />

www.madcitylabs.com sales@madcitylabs.com phone: 608-298-0855 fax: 608-298-9525

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