VHS-4, VHS-6 and VHS-250 Diffusion Pumps - Ideal Vacuum ...

DRAFT 3/9/05
1-4
Air Speed (//sec)
1800
1200
VHS-4, VHS-6 and VHS-250 Diffusion Pumps
Figure 1-1 shows the VHS-4 speed and throughput curves.
900
600
300
Speed with standard cold cap
Speed with extended cold cap
10 −10
10 −9
10 −4
10 −7
10 −10
10 −5
10 −4
10 −3
10 −2
10 −1
0 0
INLET PRESSURE — TORR
*Note: Speed curves were generated according to AVS Standards 4.1
Figure 1-1 VHS-4 Speed and Throughput Curves
NOTE Speed curves were generated according to AVS Standard 4.1.
Figure 1-2 gives the VHS-4 wiring information.
Figure 1-2 VHS-4 Wiring Information
5
4
3
2
1
Throughput (Torr-//sec)