VHS-4, VHS-6 and VHS-250 Diffusion Pumps - Ideal Vacuum ...
VHS-4, VHS-6 and VHS-250 Diffusion Pumps - Ideal Vacuum ...
VHS-4, VHS-6 and VHS-250 Diffusion Pumps - Ideal Vacuum ...
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DRAFT 3/9/05<br />
4-2<br />
<strong>VHS</strong>-4, <strong>VHS</strong>-6 <strong>and</strong> <strong>VHS</strong>-<strong>250</strong> <strong>Diffusion</strong> <strong>Pumps</strong><br />
4.3 Poor Pump or System Performance<br />
Before proceeding with a step-by-step troubleshooting program, check the performance <strong>and</strong><br />
accuracy of the vacuum gauges used on the system. Table 4-1 shows the most frequent<br />
faults, their probable causes, <strong>and</strong> specific repair actions required for each.<br />
Table 4-1 Troubleshooting<br />
Symptom Probable Cause Repair Action<br />
Poor system pressure Leak in system — virtual or real. Locate <strong>and</strong> repair.<br />
High process gas load. Measure gas load,<br />
<strong>and</strong> eliminate the cause.<br />
System dirty. Clean system to reduce<br />
outgassing.<br />
Poor ultimate pressure Contaminated pump fluid. Examine, clean pump,<br />
<strong>and</strong> replace fluid.<br />
Slow pumpdown (prolonged<br />
cycle after checking gas load<br />
conditions)<br />
Low heat input. Check voltage.<br />
Check for continuity, burned out<br />
element, poor thermal contact.<br />
Inadequate cooling water flow. Check water pressure. Check<br />
tubing for obstructions or<br />
backpressure.<br />
Excessive or too cold<br />
cooling water.<br />
Check temperature, adjust flow.<br />
High forepressure. Check for leak in foreline, poor<br />
mechanical pump performance,<br />
breakdown of mechanical pump<br />
fluid.<br />
Water in Quick Cool Coil. Check <strong>and</strong> remove water.<br />
Low heat input. Check heaters.<br />
Low oil level. Add oil.<br />
Malfunctioning pump assembly<br />
Improperly located jets.<br />
Damaged jet system.<br />
Check <strong>and</strong> repair or replace.