2011 MIT Lincoln Laboratory Facts

Facilities and Field Sites
Facilities
Microelectronics Laboratory
The Lincoln Laboratory Microelectronics Laboratory is
a state-of-the-art semiconductor research and fabrication
facility supporting a wide range of Lincoln Laboratory
programs. The 70,000 sq ft facility has 8100 sq ft of class-10
and 10,000 sq ft of class-100 cleanroom areas.
The equipment set in this laboratory is continually updated
and includes a production-class complementary metaloxide
semiconductor (CMOS) toolset with angled ionimplantation,
cluster-metallization, and dry-etch equipment;
chemical-mechanical planarization equipment; and rapid
thermal processing and advanced lithography capabilities.
A molecular-beam epitaxy system is used to provide high
sensitivity and highly stable back-illuminated devices in the
ultraviolet and extreme ultraviolet ranges. In addition, the
Microelectronics Laboratory supports advanced packaging
with a precision multichip module (MCM) technology and
an advanced three-dimensional circuit-stacking technology.
Lincoln Space Surveillance Complex
The Lincoln Space Surveillance Complex in Westford,
Massachusetts, has played a key role in space situational
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