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X <br />
Z <br />
X <br />
Z <br />
α <br />
θ <br />
2 (µ m/step)<br />
2 (µ m/step)<br />
2 (µ m/step)<br />
2 (µ m/step)<br />
0.0012 (deg./step)<br />
0.004 (deg./step)<br />
β 0.004 (deg./step) <br />
α 0.00038 (deg./step) 1 4<br />
(step/pulse) <br />
Z 1(µ m/step) <br />
X 10(µ m/step) <br />
Z 1.67(µ m/step) <br />
4.2: KOHZU <br />
4.2.6 <br />
<br />
<br />
s-1194B1 4.11∼15cc/min<br />
1 4.12 <br />
X · <br />
17<br />
V/F CONVERTER <br />
SCA 4.13<br />
7.5 4.3<br />
<br />
<br />
<br />
ORTEC 660 1000V<br />
Keithley 428 10 9 V/A<br />
6pA<br />
V/F CONVERTER 733-1<br />
SCA<br />
ORTEC 550A<br />
4.3: <br />
30