Temperature calibration - Laytec
Temperature calibration - Laytec
Temperature calibration - Laytec
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Pre-<strong>calibration</strong><br />
Black body <strong>calibration</strong><br />
experience of major LED manufacturer:<br />
• "black body <strong>calibration</strong> of several EpiTT and<br />
EpiCurveTT systems minimized reactor-toreactor<br />
variations to less than 5K in AIXTRON<br />
G3/G4 systems"<br />
• residual temperature variations might even be real<br />
• important: keep windows clean<br />
• window cleaning is standard after any hardware<br />
equipment change (susceptor / ceiling)<br />
18 October 2009 <strong>Temperature</strong> <strong>calibration</strong><br />
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