Temperature calibration - Laytec
Temperature calibration - Laytec
Temperature calibration - Laytec
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Motivation<br />
<strong>Temperature</strong> <strong>calibration</strong><br />
• temperature is most important growth parameter<br />
• themocouple or light pipe temperature used to control<br />
reactor temperature in recipe have high offsets to pocket<br />
and wafer temperature<br />
• temperature measurement might be influenced by<br />
viewport geometry and window transparency<br />
� proper and accurate <strong>calibration</strong> of the EpiTT/EpiCurve<br />
pyrometer is essential<br />
18 October 2009 <strong>Temperature</strong> <strong>calibration</strong><br />
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