Temperature calibration - Laytec

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Viewports CCS/CRIUS viewports "new" additional effect: • nominal identical viewports have different aperture sizes • manufacturing tolerances of diameter is 2.2 mm ± 0.1 mm = 10% variation possible • this leeds to significant temperature variations � individual on-site calibration needed! � re-calibration needed when changing showerhead 18 October 2009 Temperature calibration 18
Viewports CCS/CRIUS viewports experiment: • using a black body calibrated EpiTT • measuring identical temperature ramps through 5 nominal identical viewports of "new type" • comparing to one "old type" viewport without in-situ calibration about 40K variation! 18 October 2009 Temperature calibration 19
Page 1 and 2: Temperature calibration Dr. Kolja H
Page 3 and 4: Motivation Heteroepitaxy of III-Nit
Page 5 and 6: Motivation: temperature effects Tem
Page 7 and 8: Outline • motivation • pyrometr
Page 9 and 10: Pyrometry Emissivity Corrected Pyro
Page 11 and 12: Pre-calibration Factory pre-calibra
Page 13 and 14: Pre-calibration Black body calibrat
Page 15 and 16: Outline • motivation • pyrometr
Page 17: Viewports CCS/CRIUS viewports "new"
Page 21 and 22: Solutions LayTec's new solutions fo
Page 23 and 24: Solutions Reference light source in
Page 25 and 26: Results of field test New method wa
Page 27 and 28: Results of field test New method wa
Page 29 and 30: outline Summary • black body cali

Temperature calibration - Laytec

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