Standards and reference samples for nano- & micro ... - PTB
Standards and reference samples for nano- & micro ... - PTB
Standards and reference samples for nano- & micro ... - PTB
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Nr.<br />
No.<br />
Manufacturer<br />
Hersteller<br />
K02. SiMetricS Type 2<br />
K03. SiMetricS Type 3<br />
K04 SiMetricS Type 4<br />
Modell<br />
Model<br />
Measureme<br />
nt range<br />
Messbereich<br />
Description<br />
Beschreibung<br />
I<br />
M<br />
A<br />
G<br />
E<br />
Lateral<br />
Measure<br />
ment<br />
Range<br />
lateraler<br />
Messbere<br />
ich<br />
(nm) (μm)<br />
1 grating with<br />
the period:<br />
8 or 25 µm<br />
1 grating with<br />
the period:<br />
8 or 25 µm<br />
8 gratings with<br />
the periods:<br />
4; 8; 20; 40; 80;<br />
200; 400; 800<br />
µm<br />
Trapezoidal profile:<br />
GrTz55<br />
(Trapezoidal angle<br />
54.74°)<br />
Depth: 3 µm <strong>for</strong> 8 µm<br />
period<br />
Depth: 11 µm <strong>for</strong> 25 µm<br />
period<br />
Triangular profile:<br />
GrT70<br />
(angle 70.52°)<br />
Triangular profile:<br />
GrT109<br />
(angle 109.48°)<br />
Arched profile: GrA<br />
Rectangular profile:<br />
GrRw<br />
Depth: 1 µm <strong>for</strong> 8 µm<br />
period<br />
Depth: 5 µm <strong>for</strong> 25 µm<br />
period<br />
Rectangular profile:<br />
GrRd<br />
Depth: 90 nm or 3,4 µm<br />
Material<br />
Material<br />
Substrat<br />
Substrate<br />
Dimension<br />
Dimension.<br />
(mm)<br />
Coating<br />
Beschichtung<br />
Material<br />
Material<br />
I ≤ Si 10 x 10 SiO2<br />
I ≤ Si 10 x 10 SiO2<br />
I ≤ Si SiO2<br />
Thickne<br />
ss<br />
Dicke<br />
(nm)<br />
Remarks<br />
Bemerkungen
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