Standards and reference samples for nano- & micro ... - PTB
Standards and reference samples for nano- & micro ... - PTB
Standards and reference samples for nano- & micro ... - PTB
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Nr.<br />
No.<br />
Manufacturer<br />
Hersteller<br />
C06. EU-St<strong>and</strong>ard<br />
D)<br />
x-, y-Axis:<br />
1-Dimensional<br />
D01. SiMetricS<br />
Modell<br />
Model<br />
partly available<br />
from<br />
Nanosensors<br />
D)<br />
x-, y-Achse:<br />
1-Dimensional<br />
Lateral St<strong>and</strong>ard<br />
LS<br />
Measureme<br />
nt range<br />
Messbereich<br />
Description<br />
Beschreibung<br />
I<br />
M<br />
A<br />
G<br />
E<br />
Lateral<br />
Measure<br />
ment<br />
Range<br />
lateraler<br />
Messbere<br />
ich<br />
(nm) (μm)<br />
8, 24, 80, 240,<br />
800,<br />
2 400<br />
D02. ASM 750-HD 750<br />
10...2500<br />
D03. MikroMasch TGG 01 3 000<br />
grating <strong>and</strong> waffle-like;<br />
8 - 240: pitch<br />
4µm, 8µm, 80µm;<br />
800 & 2400: pitch<br />
16 µm, 40 µm<br />
line grating,<br />
depth: 517 µm<br />
Ni replica of a CD surface<br />
structure;<br />
pits arranged in lines,<br />
pitch 750 nm; height 100<br />
nm<br />
„ridge“ line grating<br />
with < 10 nm edge radius;<br />
height: 1,8 μm<br />
Home<br />
I<br />
I<br />
≤ 200 x 200<br />
≤ (1000 x<br />
1000)<br />
250<br />
...62500<br />
I ≤ 6350 Ni<br />
I<br />
≤ 3 000 x<br />
3 000<br />
Material<br />
Material<br />
Substrat<br />
Substrate<br />
Dimension<br />
Dimension.<br />
(mm)<br />
Coating<br />
Beschichtung<br />
Material<br />
Material<br />
Si 5 x 7 Pt/Ir 70<br />
Thickne<br />
ss<br />
Dicke<br />
(nm)<br />
Remarks<br />
Bemerkungen<br />
mounted on disc<br />
∅12 mm<br />
Si 75 x 20 ISO 5436-1 Type C3<br />
∅ 6,35, 0,3<br />
mm thick<br />
Si 5 x 5 x 0,45<br />
- - "High durability"<br />
also used as tip<br />
characteriser
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