Standards and reference samples for nano- & micro ... - PTB
Standards and reference samples for nano- & micro ... - PTB
Standards and reference samples for nano- & micro ... - PTB
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Nr.<br />
No.<br />
Manufacturer<br />
Hersteller<br />
N)<br />
Probing Force<br />
N01. SiMetricS<br />
N02. SiMetricS<br />
Modell<br />
Model<br />
N)<br />
Antastkraft<br />
Probing <strong>for</strong>ce<br />
st<strong>and</strong>ard Type<br />
FC<br />
Probing <strong>for</strong>ce<br />
st<strong>and</strong>ard Type<br />
FB<br />
Measureme<br />
nt range<br />
Messbereich<br />
Description<br />
Beschreibung<br />
I<br />
M<br />
A<br />
G<br />
E<br />
Lateral<br />
Measure<br />
ment<br />
Range<br />
lateraler<br />
Messbere<br />
ich<br />
(nm) (μm)<br />
0.005 – 1.0<br />
mN/µm<br />
0.3 – 5.5<br />
mN/µm<br />
cantilever <strong>for</strong> probing<br />
with stylus intruments,<br />
indenters etc.<br />
cantilever fixed at both<br />
sides <strong>for</strong> probing with<br />
stylus intruments,<br />
indenters etc.<br />
Material<br />
Material<br />
Substrat<br />
Substrate<br />
Dimension<br />
Dimension.<br />
(mm)<br />
Coating<br />
Beschichtung<br />
Material<br />
Material<br />
I Si 15 x 15 SiO2<br />
I Si 15 x 15 SiO2<br />
Thickne<br />
ss<br />
Dicke<br />
(nm)<br />
Remarks<br />
Bemerkungen
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