Linear Motor Actuators GLM10,15,20,25 - Thk.com

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3 1 2 3 4 5 6 L i n e a r M o t o r A c t u a t o r s Linear Motor Actuator Model GLM Features High speed High High acceleration/ acceleration/ deceleration, deceleration, superb superb conformity conformity High High precision precision Long Long stroke stroke Multi-sliders Multi-sliders Clean Clean and and quiet quiet operation operation Linear motor actuator exerts high speed characteristic even with long stroke as it can directly convert electromagnetic force into the linear motion. Model GLM10 can achieve the maximum speed of 4m/s. Even with the other model numbers, the maximum speed of 3m/s is possible. Sharp acceleration acceleration and and deceleration deceleration of of 2G 2G are are achieved achieved by by reducing reducing its its weight weight as a result of using aluminum parts for the slider. Also, reducing the weight of the slider and high rigidity allow superb conformity. Outstanding positioning positioning accuracy accuracy is is achieved achieved by by full-closed full-closed feedback feedback control* control* of the linear encoder. * Full-closed feedback feedback control control … … This This method method directly directly detects detects the the slider slider position position that that is is operated operated by the the linear linear encoder. Since the magnetic plates can be jointed, the linear motor actuators can deal with longer strokes that are not possible with ball screw drive actuators. Also, the joint specifications of the base for GLM15, 20 and 25 enable even longer strokes. Multiple sliders sliders can can be be mounted mounted on on a a single single axis axis base base and and controlled independently. independently. By combining the linear motor motor with with iron iron core core and and Caged Caged Ball Ball LM LM Guide, Guide, low noise noise and and low low dust-generating dust-generating operation operation is is achieved. achieved. Note: Model Model GLM10 uses uses the the full-ball full-ball type type LM LM Guide Guide (HSR10RM). (HSR10RM). 130 Linear Motor Actuator Model GLM Size Comparison GL GLM GLM10 40 GLM10 (127) GL GLM GLM15 75.6 GLM15 (159) GL GLM GLM20 80 GLM20 (205) GL GLM GLM25 GLM25 GLM25 326 Stroke between the mechanical stoppers: STMAX Base length: L0 LL0 Slider length: a Stroke between the mechanical stoppers: STMAX Base length: LL0 L0 Stroke between the mechanical stoppers: STMAX Base length: L0 LL0 Slider length: a Slider length: length: a Stroke between the mechanical stoppers: STMAX Base length: LL0 L0 Model Model no. GLM10 GLM15 GLM20 GLM25 Base Base length: length: L0 L0 0 [mm] 270 to to 990 990 500 to to 3074 3074 400 to to 2200 2200 545 to to 3041 3041 Stroke between the mechanical mechanical stoppers: ST [mm] stoppers: STMAX STMAX MAX 40 to to 865 865 240 to to 2898 2898 20 to 1950 1950 265 to to 2781 2781 103 (148)* (148)* 126 (126)* (126)* 198 (208)* (208)* 190 (190)* (190)* Slider length: a [mm] S type M type L type Motor type Motor type Motor type 163 (208)* 196 (196)* 318 (328)* 380 (380)* * Values in in ( ( ) ) indicate indicate the the slider slider length length when when the the magnetic magnetic pole pole sensor sensor is is attached. attached. Slider length: a — — 438 (448)* (448)* —
Linear Motor Actuator Model GLM Performance Comparison Model no. Appearance Features / application example example GLM10 GLM15 GLM20 GLM25 Glossary Maximum thrust thrust This indicates indicates the the maximum maximum value value of of the the force force that that the the slider can can generate generate instantaneously instantaneously towards towards the the traveling direction. direction. Rated continuous thrust This indicates indicates the the force force that that the the slider slider can can continuously continuously generate towards the the traveling traveling direction. direction. Low-profile design For compact transfer system (up to 53[N]) 53[N]) [Application example] • Equipment for manufacturing hard hard disc disc drive components components • Semiconductor die bonder Extruded Extruded aluminum parts with reasonable cost and Caged Caged Ball LM Guide (SSR15XV/XW) (SSR15XV/XW) For compact transfer system (up to 279[N]) 279[N]) [Application example] • Semiconductor wafer transfer transfer • Transfer of of CCD CCD camera camera for for inspection inspection equipment equipment Extruded Extruded aluminum parts with reasonable cost and Caged Caged Ball LM Guide (SSR20XW) (SSR20XW) For medium to large transfer system (up to 933[N]) [Application example] • • Glass Glass substrate transfer system • Glass substrate/printed substrate/printed circuit circuit board board inspection equipment equipment • Glass substrate substrate manufacturing manufacturing equipment equipment • Glass substrate substrate exposure exposure equipment equipment • Semiconductor wafer stocker stocker • DNA chip manufacturing equipment • Large-size inkjet printer • Printed circuit circuit board board inspection inspection equipment equipment • Measuring instrument instrument of of automotive automotive parts parts • Plywood manufacturing manufacturing equipment equipment Extruded Extruded aluminum parts with reasonable cost and Caged Caged Ball LM Guide (SSR25XW) (SSR25XW) For ultra-large transfer system (up (up to to 3072[N]) 3072[N]) [Application example] • Large-size glass glass substrate substrate inspection inspection equipment equipment • Large-size glass glass substrate substrate manufacturing manufacturing equipment equipment • Evaluation Evaluation equipment of automotive parts Magnetic pole sensor sensor The sensor sensor that that identify identify N N and and S S poles poles of of the the magnet. magnet. This is is used used to to detect detect the the positional positional relationships relationships between the the coil coil of of the the movable movable element element and and N N and and S S poles of of the the permanent permanent magnet. magnet. Maximum load load capacity capacity Motor type (Slider size) S type M type S type M type S type M type L type S type M type This indicates indicates the the maximum maximum weight weight that that can can be be transferred by by loading loading onto onto the the actuator. actuator. * THK defines defines maximum maximum load load capacity capacity as as the the weight weight that can can be be transferred transferred with with approx. approx. 0.5G 0.5G acceleration. acceleration. For actual actual selection, selection, see see the the Selection Selection Method Method of of Model GLM GLM (Pages (Pages 62 to to 64) 64) in in this this catalog catalog and and please please contact contact THK. THK. Maximum thrust 26 53 150 279 333 (285)* (285)* 612 (481)* (481)* 933 1557 3072 Thrust [N] Rated continuous thrust 6 13 40 81 59 (48)* (48)* 113 (124)* (124)* 178 450 892 * Values in in ( ( ) ) are are for for 100V 100V Optical linear encoder Stroke between the Maximum mechanical stoppers [mm] Positioning Maximum speed load capacity Without magnetic With magnetic Resolution [μm] [μm] repeatability [μm] pole sensor pole sensor [kg] repeatability [μm] [m/s] pole sensor pole sensor [kg] 145 to 865 85 to to 805 805 324 to 2898 254 to 2828 150 to 1950 30 to 1830 90 to 1710 285 to 2781 407 to 2591 This is is a a position position detector detector that that detects detects the the positional information information of of the the slider slider by by using using light (laser (laser light). light). This This is is used used for for the the application that that require require high high precision precision and and high resolution. resolution. Magnetic linear encoder This is is a a position position detector detector that that detects detects the the positional information information of of the the slider slider by by using using magnetism. This This possesses possesses superb superb weatherability weatherability compared to to the the optical optical type. type. Also, Also, the the magnetic magnetic linear encoder encoder is is normally normally used used when when the the overall overall length of of the the unit unit is is the the joint joint specification. specification. 100 to 820 40 to to 760 760 310 to 2884 240 to 2814 140 to 1940 20 to 1820 80 to 1700 265 to 2761 402 to 2586 6 12 19.5 38.5 70 140 210 193 415 ±1, ±5 optical linear linear ( encoder ) ±1 optical optical linear ( encoder encoder ) ±10 magnetic linear linear ( encoder ) ±1 optical optical linear ( encoder encoder ) ±10 magnetic linear linear ( encoder ) ±1 optical optical linear ( encoder encoder ) ±10 magnetic linear linear ( encoder ) Position to to a a given given point point from from the the same same direction direction seven times, times, measure measure the the stopping stopping points points and and then then calculate the the value value of of half half the the maximum maximum difference difference of the the reading. reading. Perform Perform this this measurement measurement at at the the center and and at at both both ends ends of of the the travel travel distance; distance; the the largest value value becomes becomes the the measurement measurement value, value, and the the positioning positioning repeatability repeatability is is expressed expressed by by placing the the symbol symbol "±" "±" next next to to the the value value of of half half the the maximum difference. difference. 0.1 to 5.0 5.0 optical linear linear ( encoder ) 0.1 to 1.0 optical linear linear ( encoder ) 10.0 magnetic linear linear ( encoder ) 0.1 to 1.0 optical linear linear ( encoder ) 10.0 magnetic linear linear ( encoder ) 0.1 to 1.0 optical linear linear ( encoder ) 10.0 magnetic linear linear ( encoder ) Positioning repeatability (diagram on the right) Resolution Minimum travel travel distance distance that that can can be be set. set. Note: This This does does not not guarantee guarantee the the positioning positioning accuracy. accuracy. 4 ( 5μm resolution resolution ) 3 ( 1μm 1μm resolution ) 3 ( 1μm resolution resolution ) 3 ( 1μm resolution resolution ) Positioning repeatability t1 t2 t3
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Page 9 and 10: GLM10 GLM15 GLM20 GLM25 Driver Mode
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Linear Motor Actuators GLM10,15,20,25 - Thk.com

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