Linear Motor Actuators GLM10,15,20,25 - Thk.com
Linear Motor Actuators GLM10,15,20,25 - Thk.com
Linear Motor Actuators GLM10,15,20,25 - Thk.com
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<strong>Linear</strong> <strong>Motor</strong> Actuator Model GLM<br />
Performance Comparison<br />
Model no. Appearance<br />
Features / application example<br />
example<br />
<strong>GLM10</strong><br />
GLM<strong>15</strong><br />
GLM<strong>20</strong><br />
GLM<strong>25</strong><br />
Glossary<br />
Maximum thrust<br />
thrust<br />
This indicates indicates the the maximum maximum value value of of the the force force that that the<br />
the<br />
slider can can generate generate instantaneously instantaneously towards towards the<br />
the<br />
traveling direction.<br />
direction.<br />
Rated continuous thrust<br />
This indicates indicates the the force force that that the the slider slider can can continuously<br />
continuously<br />
generate towards the the traveling traveling direction.<br />
direction.<br />
Low-profile design<br />
For <strong>com</strong>pact transfer system (up to 53[N])<br />
53[N])<br />
[Application example]<br />
• Equipment for manufacturing hard hard disc<br />
disc<br />
drive <strong>com</strong>ponents<br />
<strong>com</strong>ponents<br />
• Semiconductor die bonder<br />
Extruded Extruded aluminum parts with reasonable cost<br />
and Caged Caged Ball LM Guide (SSR<strong>15</strong>XV/XW)<br />
(SSR<strong>15</strong>XV/XW)<br />
For <strong>com</strong>pact transfer system (up to 279[N])<br />
279[N])<br />
[Application example]<br />
• Semiconductor wafer transfer<br />
transfer<br />
• Transfer of of CCD CCD camera camera for for inspection inspection equipment<br />
equipment<br />
Extruded Extruded aluminum parts with reasonable cost<br />
and Caged Caged Ball LM Guide (SSR<strong>20</strong>XW)<br />
(SSR<strong>20</strong>XW)<br />
For medium to large transfer system (up to 933[N])<br />
[Application example]<br />
• • Glass Glass substrate transfer system<br />
• Glass substrate/printed substrate/printed circuit circuit board<br />
board<br />
inspection equipment<br />
equipment<br />
• Glass substrate substrate manufacturing manufacturing equipment<br />
equipment<br />
• Glass substrate substrate exposure exposure equipment<br />
equipment<br />
• Semiconductor wafer stocker<br />
stocker<br />
• DNA chip manufacturing equipment<br />
• Large-size inkjet printer<br />
• Printed circuit circuit board board inspection inspection equipment<br />
equipment<br />
• Measuring instrument instrument of of automotive automotive parts<br />
parts<br />
• Plywood manufacturing manufacturing equipment<br />
equipment<br />
Extruded Extruded aluminum parts with reasonable cost<br />
and Caged Caged Ball LM Guide (SSR<strong>25</strong>XW)<br />
(SSR<strong>25</strong>XW)<br />
For ultra-large transfer system (up (up to to 3072[N])<br />
3072[N])<br />
[Application example]<br />
• Large-size glass glass substrate substrate inspection inspection equipment<br />
equipment<br />
• Large-size glass glass substrate substrate manufacturing manufacturing equipment<br />
equipment<br />
• Evaluation Evaluation equipment of automotive parts<br />
Magnetic pole sensor<br />
sensor<br />
The sensor sensor that that identify identify N N and and S S poles poles of of the the magnet.<br />
magnet.<br />
This is is used used to to detect detect the the positional positional relationships<br />
relationships<br />
between the the coil coil of of the the movable movable element element and and N N and and S<br />
S<br />
poles of of the the permanent permanent magnet.<br />
magnet.<br />
Maximum load load capacity<br />
capacity<br />
<strong>Motor</strong> type<br />
(Slider size)<br />
S type<br />
M type<br />
S type<br />
M type<br />
S type<br />
M type<br />
L type<br />
S type<br />
M type<br />
This indicates indicates the the maximum maximum weight weight that that can can be<br />
be<br />
transferred by by loading loading onto onto the the actuator.<br />
actuator.<br />
* THK defines defines maximum maximum load load capacity capacity as as the the weight<br />
weight<br />
that can can be be transferred transferred with with approx. approx. 0.5G 0.5G acceleration.<br />
acceleration.<br />
For actual actual selection, selection, see see the the Selection Selection Method Method of<br />
of<br />
Model GLM GLM (Pages (Pages 62 to to 64) 64) in in this this catalog catalog and<br />
and<br />
please please contact contact THK.<br />
THK.<br />
Maximum thrust<br />
26<br />
53<br />
<strong>15</strong>0<br />
279<br />
333 (285)*<br />
(285)*<br />
612 (481)*<br />
(481)*<br />
933<br />
<strong>15</strong>57<br />
3072<br />
Thrust [N]<br />
Rated continuous<br />
thrust<br />
6<br />
13<br />
40<br />
81<br />
59 (48)*<br />
(48)*<br />
113 (124)*<br />
(124)*<br />
178<br />
450<br />
892<br />
* Values in in ( ( ) ) are are for for 100V<br />
100V<br />
Optical linear encoder<br />
Stroke between the<br />
Maximum<br />
mechanical stoppers [mm] Positioning<br />
Maximum speed<br />
load capacity<br />
Without magnetic<br />
With magnetic<br />
Resolution [μm]<br />
[μm]<br />
repeatability [μm]<br />
pole sensor pole sensor<br />
[kg] repeatability [μm]<br />
[m/s]<br />
pole sensor pole sensor<br />
[kg]<br />
145 to 865<br />
85 to to 805<br />
805<br />
324 to 2898<br />
<strong>25</strong>4 to 2828<br />
<strong>15</strong>0 to 1950<br />
30 to 1830<br />
90 to 1710<br />
285 to 2781<br />
407 to <strong>25</strong>91<br />
This is is a a position position detector detector that that detects detects the<br />
the<br />
positional information information of of the the slider slider by by using<br />
using<br />
light (laser (laser light). light). This This is is used used for for the<br />
the<br />
application that that require require high high precision precision and<br />
and<br />
high resolution.<br />
resolution.<br />
Magnetic linear encoder<br />
This is is a a position position detector detector that that detects detects the<br />
the<br />
positional information information of of the the slider slider by by using<br />
using<br />
magnetism. This This possesses possesses superb superb weatherability<br />
weatherability<br />
<strong>com</strong>pared to to the the optical optical type. type. Also, Also, the the magnetic<br />
magnetic<br />
linear encoder encoder is is normally normally used used when when the the overall<br />
overall<br />
length of of the the unit unit is is the the joint joint specification.<br />
specification.<br />
100 to 8<strong>20</strong><br />
40 to to 760<br />
760<br />
310 to 2884<br />
240 to 2814<br />
140 to 1940<br />
<strong>20</strong> to 18<strong>20</strong><br />
80 to 1700<br />
265 to 2761<br />
402 to <strong>25</strong>86<br />
6<br />
12<br />
19.5<br />
38.5<br />
70<br />
140<br />
210<br />
193<br />
4<strong>15</strong><br />
±1, ±5<br />
optical linear<br />
linear ( encoder )<br />
±1<br />
optical optical linear<br />
( encoder<br />
encoder )<br />
±10<br />
magnetic linear<br />
linear ( encoder )<br />
±1<br />
optical optical linear<br />
( encoder<br />
encoder )<br />
±10<br />
magnetic linear<br />
linear ( encoder )<br />
±1<br />
optical optical linear<br />
( encoder<br />
encoder )<br />
±10<br />
magnetic linear<br />
linear ( encoder )<br />
Position to to a a given given point point from from the the same same direction<br />
direction<br />
seven times, times, measure measure the the stopping stopping points points and and then<br />
then<br />
calculate the the value value of of half half the the maximum maximum difference<br />
difference<br />
of the the reading. reading. Perform Perform this this measurement measurement at at the<br />
the<br />
center and and at at both both ends ends of of the the travel travel distance; distance; the<br />
the<br />
largest value value be<strong>com</strong>es be<strong>com</strong>es the the measurement measurement value,<br />
value,<br />
and the the positioning positioning repeatability repeatability is is expressed expressed by<br />
by<br />
placing the the symbol symbol "±" "±" next next to to the the value value of of half half the<br />
the<br />
maximum difference.<br />
difference.<br />
0.1 to 5.0<br />
5.0<br />
optical linear<br />
linear ( encoder )<br />
0.1 to 1.0<br />
optical linear<br />
linear ( encoder )<br />
10.0<br />
magnetic linear<br />
linear ( encoder )<br />
0.1 to 1.0<br />
optical linear<br />
linear ( encoder )<br />
10.0<br />
magnetic linear<br />
linear ( encoder )<br />
0.1 to 1.0<br />
optical linear<br />
linear ( encoder )<br />
10.0<br />
magnetic linear<br />
linear ( encoder )<br />
Positioning repeatability (diagram on the right)<br />
Resolution<br />
Minimum travel travel distance distance that that can can be be set.<br />
set.<br />
Note: This This does does not not guarantee guarantee the the positioning positioning accuracy.<br />
accuracy.<br />
4<br />
( 5μm resolution resolution )<br />
3<br />
( 1μm 1μm resolution )<br />
3<br />
( 1μm resolution resolution )<br />
3<br />
( 1μm resolution resolution )<br />
Positioning repeatability<br />
t1<br />
t2<br />
t3
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