use of NEG Pumps and Coatings in Large Vacuum Systems - CERN ...
use of NEG Pumps and Coatings in Large Vacuum Systems - CERN ...
use of NEG Pumps and Coatings in Large Vacuum Systems - CERN ...
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Zr-Al alloy, Zr-V-Fe alloy, …<br />
commonly <strong>use</strong>d for Ultra High <strong>Vacuum</strong> (UHV) applications<br />
very effective <strong>in</strong> pump<strong>in</strong>g active gas (H2, CO, ...)<br />
not suitable for pump<strong>in</strong>g He, Ar, CH4, ...<br />
limited number <strong>of</strong> activation/vent<strong>in</strong>g cycles<br />
not suitable for vacuum systems rout<strong>in</strong>ely open to air<br />
an “<strong>in</strong> situ” bake-out is required (high temperature)<br />
usually available as strips or cartridges (thick powder layer)<br />
CAS May 17-23, 2006<br />
Non Evaporable Getter (<strong>NEG</strong>)<br />
C. Benvenuti, Non-evaporable<br />
getters: from pump<strong>in</strong>g strips to th<strong>in</strong><br />
film coat<strong>in</strong>gs, Proceed<strong>in</strong>gs <strong>of</strong> EPAC<br />
1998, Stockholm, June 1998<br />
C. Benvenuti et al., A novel route to<br />
extreme vacua: the non-evaporable<br />
getters th<strong>in</strong> film coat<strong>in</strong>gs, <strong>Vacuum</strong><br />
53 (1999) 219-225<br />
Produced by sputter<strong>in</strong>g:<br />
uniform <strong>and</strong> distributed coat<strong>in</strong>g<br />
different alloys/compounds (composite cathodes)<br />
Getter materials:<br />
Ti, Zr, Hf, V, …<br />
Thickness: 1 micron<br />
<strong>NEG</strong> coat<strong>in</strong>g<br />
Low activation temperature ( compatible with alum<strong>in</strong>ium alloy<br />
F. Mazzol<strong>in</strong>i – The <strong>use</strong> <strong>of</strong> <strong>NEG</strong> <strong>Pumps</strong> <strong>and</strong> <strong>Coat<strong>in</strong>gs</strong> <strong>in</strong> <strong>Large</strong> <strong>Vacuum</strong> <strong>Systems</strong>: Experience <strong>and</strong> limitations
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