use of NEG Pumps and Coatings in Large Vacuum Systems - CERN ...
use of NEG Pumps and Coatings in Large Vacuum Systems - CERN ...
use of NEG Pumps and Coatings in Large Vacuum Systems - CERN ...
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CAS May 17-23, 2006<br />
The ESRF experience<br />
(R.Kersevan, M.Hahn, F.Demarcq, ESRF, 45th IUVSTA Workshop, Catania 2006)<br />
First <strong>NEG</strong> coated chamber <strong>in</strong>stalled <strong>in</strong> 2000<br />
Reduced BS levels<br />
Faster vacuum condition<strong>in</strong>g<br />
Resistance to several vent<strong>in</strong>g/activation cycles<br />
No adverse effect on the mach<strong>in</strong>e:<br />
i.e. peel<strong>in</strong>g-<strong>of</strong>f <strong>of</strong> the coat<strong>in</strong>g, impedance budget, …<br />
F. Mazzol<strong>in</strong>i – The <strong>use</strong> <strong>of</strong> <strong>NEG</strong> <strong>Pumps</strong> <strong>and</strong> <strong>Coat<strong>in</strong>gs</strong> <strong>in</strong> <strong>Large</strong> <strong>Vacuum</strong> <strong>Systems</strong>: Experience <strong>and</strong> limitations