use of NEG Pumps and Coatings in Large Vacuum Systems - CERN ...
use of NEG Pumps and Coatings in Large Vacuum Systems - CERN ...
use of NEG Pumps and Coatings in Large Vacuum Systems - CERN ...
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<strong>NEG</strong> coat<strong>in</strong>gs (TiZrV) <strong>in</strong> large vacuum system<br />
Pros/<br />
• simplify the design <strong>of</strong> a complex vacuum chamber<br />
• pump without requir<strong>in</strong>g additional space<br />
• can substitute a “traditional” pump<strong>in</strong>g system (ESRF, SOLEIL)<br />
• are compatibile with many materials (low activation temperature)<br />
• reduce the outgass<strong>in</strong>g <strong>of</strong> a surface<br />
• reduce SEY (RHIC, LHC, ...)<br />
Cons/<br />
• not suitable for noble gases <strong>and</strong> methane<br />
• not suitable for systems frequently vented<br />
• not replaceable !!!<br />
•age<strong>in</strong>g (> 30 – 50 activation/vent<strong>in</strong>g cycles ?)<br />
• require to be baked (activation)<br />
•cost (?)<br />
• relatively new technology<br />
CAS May 17-23, 2006<br />
F. Mazzol<strong>in</strong>i – The <strong>use</strong> <strong>of</strong> <strong>NEG</strong> <strong>Pumps</strong> <strong>and</strong> <strong>Coat<strong>in</strong>gs</strong> <strong>in</strong> <strong>Large</strong> <strong>Vacuum</strong> <strong>Systems</strong>: Experience <strong>and</strong> limitations
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