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Why glow d<strong>is</strong>charge?<br />
• Neutral particles are difficult to accelerate. Ions<br />
and electrons can be extracted from a glow<br />
d<strong>is</strong>charge and easily accelerated.<br />
• Accelerated inert ions are used for:<br />
Ion milling<br />
Sputter deposition<br />
• Accelerated reactive ions are used for:<br />
Reactive ion beam etching (RIBE)<br />
Reactive ion etching (RIE)<br />
• Accelerated ions can be filtered and counted:<br />
Residual gas analys<strong>is</strong> (RGA)
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