What is vacuum?

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Gas molecule speed d<strong>is</strong>tribution P Derived from kinetic gas theory () v ⎡ = 4π ⎢ ⎣ m 2πkT ⎤ ⎥ ⎦ 3 2 v 2 e −mv v = gas molecule speed m = gas molecule mass k = Boltzmann’s constant 2 2kT
v rms = Gas molecule speed & mean free path Derived from kinetic gas theory 3kT m v rms = root mean square velocity λ = kT 2π d 2 p λ = mean free path d = gas molecule diameter
Page 1 and 2: Lecture 6: Vaccum & plasmas Outline
Page 3 and 4: Why vacuum? • Control a chemical
Page 5: Kinetic gas theory A theory that co
Page 9 and 10: m 1 10 -1 10 -2 D 10 -5 Molecular f
Page 11 and 12: Electrical feedthrough Ceramics Cha
Page 13 and 14: B A A Rotary vane pump • Very com
Page 15 and 16: Scroll pump • Moving scroll orbit
Page 17 and 18: Diaphragm pump + Oil free + Reliabl
Page 19 and 20: Roots pump + High capacity from 10
Page 21 and 22: Turbo pump + High capacity from 10
Page 23 and 24: Cryo pump + Very High capacity down
Page 25 and 26: Diffusion pump + Simple pump withou
Page 27 and 28: Ion pump + Simple pump without movi
Page 29 and 30: Measuring vacuum 10 -12 10 -10 10 -
Page 31 and 32: Capacitive membrane gauge (CM) •
Page 33 and 34: I I g Ion vacuum gauge • Electron
Page 35 and 36: What is a glow discharge? • Glow
Page 37 and 38: Why glow discharge? • Radicals fr
Page 39 and 40: DC-plasma reactor Electrodes must h
Page 41 and 42: Glow, charge, & field distribution
Page 43 and 44: Area A 1 DC-bias V 1 / V 2 ≈ (A 2
Page 45 and 46: Water Water Inductively coupled pla

What is vacuum?

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