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<strong>PLATIT</strong> PL70<br />
Upgradeable to 80+<br />
General Information<br />
• 1-linear-cathode compact hardcoating unit<br />
• Based on <strong>PLATIT</strong> planar-cathodic ARC-technology<br />
• The easy-to-start coating unit<br />
• Fully upgradeable to p80+<br />
Hard Coatings<br />
• Monoblock and gradient coatings<br />
• Main standard coatings: TiN, TiCN-grey<br />
• See all 6 standard coatings on page 30-31<br />
4<br />
Hardware<br />
• Usable plasma volume: Ø300 x H400 mm<br />
• Max. substrate load: 50 kg<br />
<strong>PLATIT</strong><br />
General Information<br />
and<br />
80 80+<br />
• Compact hardcoating unit<br />
®<br />
• Based on <strong>PLATIT</strong> LARC technology (LAteral Rotating Cathodes)<br />
Hard Coatings<br />
• Main standard coatings: TiN, AlTiN-G, nACo<br />
• See all 15 standard coatings on page 30-31<br />
• Available : AlCrN 3 ®<br />
Triple Coatings 3 ®<br />
Hardware<br />
• Usable plasma volume: Ø300 x H400 mm<br />
• Max. substrate load: 50 kg<br />
80+pAdditional Hardware<br />
®<br />
®<br />
5<br />
• Pulsed BIAS supply (350 kHz)<br />
• Dust filter for heaters<br />
®
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