Integration of epitaxial SiGe(C) layers in advanced CMOS devices ...
Integration of epitaxial SiGe(C) layers in advanced CMOS devices ...
Integration of epitaxial SiGe(C) layers in advanced CMOS devices ...
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Selective growth <strong>of</strong> boron doped<br />
<strong>SiGe</strong><br />
• <strong>SiGe</strong> Source/Dra<strong>in</strong><br />
• <strong>SiGe</strong> channel<br />
• HBT applications<br />
• Future <strong>devices</strong>, opto etc...<br />
• Selective growth on patterned wafers<br />
– All <strong>in</strong>fluenced by pattern dependency or<br />
load<strong>in</strong>g effect<br />
1919