Integration of epitaxial SiGe(C) layers in advanced CMOS devices ...
Integration of epitaxial SiGe(C) layers in advanced CMOS devices ...
Integration of epitaxial SiGe(C) layers in advanced CMOS devices ...
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Pattern dependency<br />
21<br />
80<br />
Large growth rate<br />
and Ge amount<br />
variation when<br />
chang<strong>in</strong>g amount <strong>of</strong><br />
open Si (Si coverage)<br />
Ge [%]<br />
20<br />
19<br />
18<br />
17<br />
16<br />
15<br />
70<br />
60<br />
50<br />
40<br />
30<br />
Growth rate [Å/m<strong>in</strong>]<br />
14<br />
0.10 1.00 10.00 100.00<br />
Si Coverage [%]<br />
20<br />
2121