Leybold Vacuum Products, TRIVAC A, Dual Stage, Rotary Vane ...

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:rJ § () ~ ~ ~ ~- ~ ::;,. o· ::J r- Symptoms 3. The pump will net achieve its ultimate pressure (cent'd.). Trouble Area I. Meter (73) m. Medule a-rings (47) are dirty er damaged. Probable Cause Meter is retating in wreng directien. Meter malfunctien Oirty er damaged a-rings (47) are allewing venting ef medule. Interchange line ends. Check rotatienal leek bearing. Centact meter manufacturer's service center. Install new a-rings (47). 0-13 & F-1b 0-13 & F-1 B-1 thru F-17 n. Intake tube. a-ring (5) is allewing venting ef medule. Install new a-ring (5). B-1, B-2, B-4, & 0-4 Sealing surface en bettem ef tube is scratched. Smo.eth scratches with jeweler's reuge. B-1, B-2, & B-4 4. The evacuated vessel er system is vented to. e. For D4A, D16A, Valve plate (58) is dirty D60A, and D90A er wern. pump models only-valve plate (58) a. <strong>Vacuum</strong> line er evacuated vessel <strong>Vacuum</strong> line er vessel centains leak. + Clean er replace valve plate. Repair leak er + clean a-ring if dirty. B-1 thru B-7 & 0-11 atmespheric pressure /t----------+-I----------+------------------+---------I after pump shutdewn. b. Anti-suck back ·Valve disk (67) is wern Remeve eld disk (67) and install new ene or B-1 thru B-7, valve assembly er dirty. clean eld disk. Fig. 5-13, & 0-5 Valve disk (67) and + Clean disk and pisten er install new enes. B-1 thru B-7, C-1 pisten (68) are stuck in + Clean intake tube pertien ef high vacuum & 0-5 place in high vacuum pump cylinder (55). pump cylinder (55). ·This celumn centains the disassembly steps required to. perferm the cerrective actien. Seme critical assembly steps are also. listed. If the sectien is net specified, the steps are lecated in Sectien 5. + Use the general cleaning instructiens at the beginning ef Section 5-E. ~ -..J
~ 00 TABLE 6-1. TROUBLESHOOTING CHART (Continued) Symptoms 4. The evacuated vessel or system is vented to atmospheric pressure after pump shutdown (cont'd.). 5. The pump is excessively noisy. Recommended Trouble Area Probable Cause Corrective Action b. Anti-suck back Centrifugal switch (39)/ + Clean assembly (39/41142). valve assembly lever (41 )/spring (42) (cont'd.). assembly is excessively dirty. Air inlet tube (69) is + Clean air inlet tube (69). clogged. Centrifugal switch (39) is Install new centrifugal switch (39). malfunctioning. Lever (41) is bent. Straighten or install new lever (41). a. Intake or exhaust Line contains restriction Clear line. connecting lines Repair Steps * B-1 thru C-6, F-9, F-11, & F-12 B-1 thru C-7, C-14, F-7, F-9, F-11&F-12 B-1 thru C-5, F-9, F-11,&F-12 B-1 thru C-6, F-9, F-11, & F-12 B-1 b. Slap noise heard The silencing hole is the + Use a fine wire to clear any dirt from (oil slap) when tiny hole in the side of the the silencing hole. DO NOT attaining ultimate gas ballast valve (17) ENLARGE THE HOLE. pressure. stem just below the bolting flange. c. Coupling (37) Coupling and/or element Install new element and/or coupling. . and/or elastic is worn. element (36) d. Disk (61) Disk is bent. Straighten disk or install new disk. B-5 See Symptom 11a. B-1 thru B-8 I Jj § () ~ = ~ ~ - e. Module Module contains insuffi- See Symptom 3g. cient lubricating fluid. f. Module bushing Lubricating holes in end Clear holes so pump fluid can lubricate the plates are clogged. shaft bushing. g. Shipping wedge The shipping wedge Remove shipping wedge. NOTE: Running was not removed. the pump with the shipping wedge installed can result in damage to the anti-suckback mechanism. dIsassembly steps required to perform the corrective action. Some critical assembly steps are specified, the steps are located in Section 5. 'tnl",.. ftf SectIon 6-E. See Symptom 3g. E-3 Sec. 3-3, Step 2. Symptom 4b.
Page 1 and 2: Vacuum Process Measuring and LEY BO
Page 3 and 4: Death or serious injury can result
Page 5 and 6: LIST OF TABLES Table Title Page t "
Page 7 and 8: 011:' DRAIN PORTS WITH PLUG SCREW (
Page 9 and 10: ,-- \ \ \ EXHAUST HOLES 51 \ I lTA
Page 11 and 12: 2-5 ANTI-SUCK BACK MECHANISM When t
Page 13 and 14: install an exhaust line with a smal
Page 15 and 16: TABLE 4-1. TECHNICAL DATA \f/ Pump
Page 17 and 18: • SECTION 5 DISASSEMBLY, CLEANING
Page 19 and 20: AKE TUBE (1) 8/9 lTA-2.2 Figure 5-1
Page 21 and 22: 60 52 D2AMODULE lTA-4.15 Figure 5-3
Page 23 and 24: Figure 5-5. Removing the Cylindrica
Page 25 and 26: ,.,Acc HOLE nlAT . f'ACESAWAVFI'lOM
Page 27 and 28: NOTE; A" parts shown are from a D2A
Page 29 and 30: VALVE STOP (1)1) VALVE PLATE (501 S
Page 31 and 32: 5-E-1 Special Requirements for extr
Page 33 and 34: E 5-1. ROTOR, BEARING, SHAFT, AND V
Page 35 and 36: Step F-1 b (2) (Cont'd.) (b) For D3
Page 37 and 38: Step F-l (b) (2) (Cont'd.) (m) CAUT
Page 39 and 40: F-6 CAUTION: FAILURE TO ENSURE THAT
Page 41 and 42: Step F-6 e (Cont'd.) Figure 5-20. P
Page 43 and 44: lTA-6.13A Figure 5-22. Using a Shaf
Page 45 and 46: NOTE: This view is looking toward t
Page 47 and 48: "'" "'" Symptoms Trouble Area Proba
Page 49: ~ Symptoms Trouble Area TABLE 6-1.
Page 53 and 54: ~-- ~ TABLE 6-1. TROUBLESHOOT1NG CH
Page 55 and 56: ~ TABLE 6-1. TROUBLESHOOTING CHART
Page 57 and 58: SECTION 7 PARTS LIST 7-1 contains i
Page 59 and 60: ., iI -§ C) ~ ~ ::J §5 .:-- Ir~ o
Page 61 and 62: '."':""~ ~ § C) ::b ~I ::J :-1 !i5
Page 63 and 64: ~, jj § () ~ = ~ :::J 53 .:- ~ g:
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Page 69 and 70: ,. it § C) ~ ~ 8: ::J .... S ::J !
Page 71 and 72: II' ~ § () ~ = ~ ::J ~ .:- ~ ;::;,
Page 73 and 74: 15--- _ , 18 22 ---- -- r 47 --~S3

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