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Impact of Residual Stress in HPFS Fused Silica

Impact of Residual Stress in HPFS Fused Silica

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Due to these strong requirements, Corn<strong>in</strong>g cont<strong>in</strong>ues to deliver <strong>HPFS</strong> ® 7980 fused silica optics with these qualities by<br />

improv<strong>in</strong>g and develop<strong>in</strong>g manufactur<strong>in</strong>g processes to meet new specification requirements.<br />

For the optics manufacturer, it is important to understand the relationship between birefr<strong>in</strong>gence and wavefront distortion to<br />

determ<strong>in</strong>e cause and effect.<br />

What is considered a “low level <strong>of</strong> birefr<strong>in</strong>gence”? Is birefr<strong>in</strong>gence impact<strong>in</strong>g today’s wavefront measurements on fused<br />

silica blanks? What can photoelastic theory tell us about the relationships among stress, wavefront distortion, and<br />

birefr<strong>in</strong>gence? The results <strong>of</strong> this paper are <strong>in</strong>tended to enhance and expand our exist<strong>in</strong>g knowledge <strong>of</strong> these properties and<br />

determ<strong>in</strong>e if birefr<strong>in</strong>gence is a cause <strong>of</strong> wavefront distortion <strong>in</strong> <strong>HPFS</strong> ® blanks. This knowledge will determ<strong>in</strong>e which future<br />

actions are pursued to improve refractive <strong>in</strong>dex uniformity and reduce wavefront distortions.<br />

2.1 Interferometry Measurements<br />

2. MEASUREMENT TECHNIQUES<br />

Corn<strong>in</strong>g uses sophisticated <strong>in</strong>terferometer techniques to characterize and quantify optical aberrations. Fifteen samples were<br />

measured with a resolution <strong>of</strong> 1.11mm/pixel at the Corn<strong>in</strong>g Canton Plant <strong>in</strong> Canton, New York.<br />

The wavefront distortion, caused by refractive <strong>in</strong>dex <strong>in</strong>homogeneities, was measured us<strong>in</strong>g a Zygo Mark IV GPI phase<br />

measur<strong>in</strong>g <strong>in</strong>terferometer with a circularly polarized HeNe laser. The wavefront measurements were then analyzed us<strong>in</strong>g<br />

Zygo MetroPro s<strong>of</strong>tware, version 7.3.2. MetroPro is a GUI (Graphic User Interface) for operat<strong>in</strong>g Zygo <strong>in</strong>terferometers and<br />

analyz<strong>in</strong>g data.<br />

The lens blanks are thermally stabilized and made transparent by utiliz<strong>in</strong>g <strong>in</strong>dex-match<strong>in</strong>g oil. A HeNe laser beam is<br />

transmitted through a lens blank. While the laser beam is pass<strong>in</strong>g through the glass, the phase <strong>of</strong> the laser light is be<strong>in</strong>g<br />

altered due to the <strong>in</strong>dex <strong>of</strong> refraction variations. An <strong>in</strong>terference pattern is formed when the measur<strong>in</strong>g wavefront <strong>of</strong> the<br />

<strong>in</strong>terferometer comb<strong>in</strong>es with a reference wavefront. The pattern formed is <strong>in</strong>dicative <strong>of</strong> the phase variation and, therefore,<br />

the <strong>in</strong>dex variation. By mak<strong>in</strong>g measurements <strong>of</strong> this pattern, the <strong>in</strong>terferometer can determ<strong>in</strong>e what the relative <strong>in</strong>dex <strong>of</strong><br />

refraction is for a matrix <strong>of</strong> po<strong>in</strong>ts (or pixels) over the aperture <strong>of</strong> test. 2 The result is a refractive <strong>in</strong>dex map <strong>of</strong> the part which<br />

can be analyzed for wavefront distortions.<br />

Aberrations can be represented with Zernike polynomials, however for the purposes <strong>of</strong> this study, only the homogeneity<br />

(peak to valley) and RMS (root mean square) values were recorded.<br />

2.2 Birefr<strong>in</strong>gence Measurements<br />

The same parts measured for homogeneity were shipped to H<strong>in</strong>ds Instruments, Inc <strong>in</strong> Portland Oregon for birefr<strong>in</strong>gence<br />

measurements. A spac<strong>in</strong>g resolution <strong>of</strong> 5mm was utilized.<br />

H<strong>in</strong>ds Instruments has developed a new birefr<strong>in</strong>gence measurement <strong>in</strong>strument known as the EXICOR TM system. It employs<br />

photoelastic modulator (PEM) technology to achieve high sensitivity, repeatability, and fast measurements. The system<br />

simultaneously determ<strong>in</strong>es both the birefr<strong>in</strong>gent magnitude and direction <strong>in</strong> a sample. 3 The <strong>in</strong>strument employs a low<br />

birefr<strong>in</strong>gence photoelastic modulator for modulat<strong>in</strong>g the polarization states <strong>of</strong> a HeNe laser beam. After the modulated laser<br />

beam passes through the sample, two detect<strong>in</strong>g channels analyze the polarization change caused by the sample. H<strong>in</strong>ds’s<br />

EXICOR TM s<strong>of</strong>tware then calculates and analyzes the measurement data. 4 The Exicor TM system determ<strong>in</strong>es the residual<br />

birefr<strong>in</strong>gence <strong>in</strong> optical components with a sensitivity <strong>of</strong> 0.005nm for magnitude and

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