Semiconductor Processing.pdf - Semiconductor Safety Association
Semiconductor Processing.pdf - Semiconductor Safety Association
Semiconductor Processing.pdf - Semiconductor Safety Association
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Controls<br />
• Lockout / Tag-out Programs<br />
• Isolation devices<br />
• Interlocks<br />
• Hardware, software, firmware<br />
• Emergency Shutdown<br />
• Emergency Machine Off (EMO)<br />
• Operator Notification<br />
• Audio-visual
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