Semiconductor Processing.pdf - Semiconductor Safety Association
Semiconductor Processing.pdf - Semiconductor Safety Association
Semiconductor Processing.pdf - Semiconductor Safety Association
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HPM Controls<br />
• Building design (H-Occupancy)<br />
• Quantity dependent<br />
• Control areas (“fire barrier”)<br />
• Storage & Dispensing rooms<br />
• Separation of incompatibles<br />
• Exit & Service corridors<br />
• Ventilation / Exhaust systems<br />
• Clean-room recirculation<br />
• Sprinkler system design<br />
• Emergency Power
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