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Optimizing Test Cell Performance Using Probing Process Analysis ...

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Pass1: <strong>Test</strong> <strong>Cell</strong> vs. VX3 Probe Card Correlation<br />

VX3<br />

WWX Alignment Errors – Vector View<br />

• VX3 measures probe center of scrub ~= center of pad<br />

• WaferWoRx shows probes scrubbing short of pad center<br />

Vector pointing to<br />

the right = scrub<br />

center is to the<br />

right of pad center<br />

June 6 to 9, 2010 IEEE SW <strong>Test</strong> Workshop 17

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